Superconductivity single photon detector with surface plasmon enhanced and manufacturing method thereof

A single-photon detector and surface plasmon technology, which is applied in superconducting devices, using electric radiation detectors for photometry, semiconductor devices, etc., can solve the problem of low photon absorption efficiency and improve photon detection efficiency , Improving the detection efficiency of the system and the effect of improving the absorption efficiency

Inactive Publication Date: 2014-06-18
NANJING UNIV
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Problems solved by technology

At present, the system efficiency of SNSPD is limited by the following aspects: one is that the NbN (niobium nitride) film used in the preparation of SNSPD has an extremely thin thickness, so its absorption efficiency for photons is low; the other is that SNSPD

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  • Superconductivity single photon detector with surface plasmon enhanced and manufacturing method thereof
  • Superconductivity single photon detector with surface plasmon enhanced and manufacturing method thereof
  • Superconductivity single photon detector with surface plasmon enhanced and manufacturing method thereof

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[0040] The present invention will be described in further detail below in conjunction with the accompanying drawings of the description.

[0041] 1. Structure of surface plasmon-enhanced superconducting single-photon detector

[0042] Such as figure 1 As shown, a surface plasmon-enhanced superconducting single-photon detector includes a magnesium oxide (MgO) substrate 1, a niobium nitride (NbN) film 2, a niobium nitride nanowire 21, and a gold (Au) film Electrodes 3 and gold (Au) nanoparticles 4 . Wherein the niobium nitride nanowires 21 are obtained by etching the niobium nitride film 2, and the width of the nanowires is generally 50nm-100nm. The distance between the nanowires is generally 50nm-100nm. The distance between the nanowires is figure 1 gaps 22 between the NbN nanowires. Magnesium oxide substrate 1, niobium nitride film 2, niobium nitride nanowires 21, gold thin film electrodes 3, and line gaps 22 between niobium nitride nanowires constitute a superconducting ...

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Abstract

The invention discloses a superconductivity single photon detector with a surface plasmon enhanced and a manufacturing method thereof. The superconductivity single photon detector is provided with gold nano-particles on the surface of a nano linear area of the superconductivity photon detector based on niobium nitride. The manufacturing method of the superconductivity single photon detector includes the following steps that a solution with lauryl mercaptan-gold nano-particles is dropped into a polytetrafluoroethylene container containing water; after a solvent is evaporated, the interface of the water and air forms a single gold nano-particle layer; polydimethylsiloxane is used for being dipped into the single gold nano-particle layer, the single gold nano-particle layer on the polydimethylsiloxane is then stuck to the nano linear area of the superconductivity single photon detector. Compared with a traditional superconductivity single photon detector based on niobium nitride, the superconductivity single photon detector promotes the photon detection efficiency from visible light with 400-1000 nm wave bands to near-infrared light, and especially, the detection efficiency of photons of 750 nm is promoted by more than 10 times.

Description

technical field [0001] The invention relates to a highly sensitive single-photon or extremely weak light signal detector, in particular to a superconducting single-photon detector based on niobium nitride, which can be applied to the detection of single-photon or extremely weak light signals in visible light and near-infrared bands . Background technique [0002] At present, the Superconducting Nanowire Single Photon Detector (SNSPD) based on NbN (Niobium Nitride) is relatively mature, with a high superconducting transition temperature (~12 K) and a low dark count rate. (10 c / s), small time jitter (60 ps), wide response spectrum (404 nm~1550 nm), fast repetition rate (>100 MHz), etc., making it suitable for quantum key distribution, integrated circuit detection, molecular Fluorescence detection and other fields have a wide range of applications. At present, the system efficiency of SNSPD is limited by the following aspects: one is that the NbN (niobium nitride) film use...

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Application Information

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IPC IPC(8): H01L31/0304H01L31/18G01J1/42
CPCG01J1/42H10N60/84H10N60/0241Y02P70/50
Inventor 金飚兵郏涛康琳吴培亨
Owner NANJING UNIV
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