Production method of miniature amorphous silicon thin film solar cells
A technology for solar cells and amorphous silicon thin films, applied in the field of solar energy applications, can solve the problems of hindering the large-scale popularization and application of amorphous silicon thin film solar cells, low conversion efficiency, and high degree of attenuation
Active Publication Date: 2016-10-26
NANTONG QIANGSHENG PHOTOVOLATIC TECH
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Problems solved by technology
[0004] However, under the severe situation of the international financial crisis and Europe and the United States' anti-dumping of Chinese photovoltaic products, and because of the disadvantages of low conversion efficiency and high attenuation of amorphous silicon thin-film solar cells compared with crystalline silicon solar cells, this hinders the development of amorphous silicon solar cells. Large-scale popularization and application of silicon thin film solar cells
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Embodiment
[0037] The present embodiment relates to a kind of production method of miniature amorphous silicon thin-film solar cells, such as figure 1 As shown, the method includes the following steps:
[0038] A. Edge grinding and one-time cleaning of the conductive glass substrate. According to the predetermined line spacing of the production line, a laser scribing is performed on the TCO film layer on it, and the whole board is divided into several pieces, which are used as electrodes of several single cells.
[0039] B. After the second cleaning, preheat, and prepare a single-layer PIN battery film layer by PECVD on the TCO film layer; the details are as follows:
[0040] To prepare the P layer, use B(CH 3 ) 3 、SiH 4 、CH 4 、H 2 Gas, deposition temperature 178℃~182℃, power density 15~19mW / cm2, hydrogen dilution ratio R 23~35, flow ratio of silane to methane 10:1~1.35, deposition pressure 0.8Torr, film thickness 15~ 20nm;
[0041] To prepare layer I, use SiH 4 、H 2 gas, where ...
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Abstract
The invention discloses a production method of a tiny amorphous silicon thin film solar cell. The method includes the following steps that laser grooving and scribing is conducted on a TCO film layer on a conductive glass substrate, and a sub battery is produced; a PIN battery film layer is prepared on the TCO film layer; the laser grooving and scribing is conducted on the PIN battery film layer; PVD progressive deposit of ZnO, aluminum and copper nickel is conducted on the PIN battery film layer, and a coating film layer is obtained; after the laser grooving and scribing is conducted on the coating film layer, a PET protective film is adhered to the coating film layer; laser marking is conducted on the PET protective film layer and the PET protective film in the marking area is tore out, tin is added to the marking area to educe positive electrode and negative electrode welding points, and the tiny amorphous silicon thin film solar cell is obtained through cutting and testing. Through improvement of the device structure and the manufacturing technique, the conversion efficiency of the manufactured tiny amorphous silicon thin film solar cell is 7% to 8%, compared with the 6% to 7% conversion efficiency of the universal cells in the present market, the conversion efficiency is increased by 1% or so, and the solar cell is more suitable for solar lamps, chargers and other products.
Description
technical field [0001] The invention belongs to the technical field of solar energy application, and in particular relates to a production method of a miniature amorphous silicon thin-film solar cell. Background technique [0002] Due to the energy crisis that has emerged in recent years and people's increasing emphasis on environmental protection, countries have implemented and promoted green energy such as wind energy, solar energy, and water energy. Among them, solar energy has attracted much attention as an inexhaustible energy source for human beings. , Some countries implement government support and subsidies for solar power generation, thereby promoting the large-scale development and application of solar power generation technology. Amorphous silicon thin-film solar cells have received more and more attention in the field of solar energy applications due to their many advantages. [0003] Large-area amorphous silicon thin-film solar cells have the following advantag...
Claims
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IPC IPC(8): H01L31/20
CPCH01L31/075H01L31/202Y02E10/548Y02P70/50
Inventor 沙嫣沙晓林
Owner NANTONG QIANGSHENG PHOTOVOLATIC TECH