Composite measurement system and measurement method for micro-array complex surface optical element

Abstract

The invention provides a composite measurement system and measurement method for a micro-array complex surface optical element. The composite measurement system is composed of a white light interference micro-structure test system, a self-induction tuning-fork atomic power microscopy measurement head, a scanning and displacement platform, a nanometer measurement machine controller and a piezoelectric ceramic controller, wherein the white light interference micro-structure test system is formed by sequentially connecting an optical microscopy interference system, a digital CCD camera and an image capture card; the self-induction tuning-fork atomic power microscopy measurement head is fixed to the white light interference micro-structure test system; the scanning and displacement platform is located below the self-induction tuning-fork atomic power microscopy measurement head and used for holding samples to be tested; the nanometer measurement machine controller and the piezoelectric ceramic controller are respectively and electrically connected with the scanning and displacement platform. The output end of the white light interference micro-structure test system is electrically connected with a PC machine, the output end of the self-induction tuning-fork atomic power microscopy measurement head is electrically connected with the PC machine through a high-speed digital signal processing servo feedback control system, the output end of the piezoelectric ceramic controller is further electrically connected with the nanometer measurement machine controller, and the input end of the piezoelectric ceramic controller is electrically connected with the PC machine through the high-speed digital signal processing servo feedback control system. Multi-information sensing and data fusion are achieved.

Description

technical field [0001] The invention relates to a microstructure morphology test. In particular, it relates to a composite measurement system and measurement method of a microarray type complex curved surface optical element that combines white light scanning interferometry with a self-induction tuning fork atomic force microscopic probe. Background technique [0002] Ultra-precision processing technology refers to all processing technologies with processing size and shape accuracy better than 0.1 μm and surface roughness Ra≤0.01 μm. Ultra-precision processing technology extends forward. When the processing precision reaches the nanometer level or the scale of the processed object is at the nanometer level, it is called nanoprocessing technology. At present, the characteristics of ultra-precision machining and nano-machining technology are: various processing methods, rich types of processing materials, complex processing structures and shapes, and high processing surface p...

AI Technical Summary

Problems solved by technology

[0006] In the past 10 years, with the support of the national science and technology plan, my country's ultra-precision processing and nano-processing technology has made great progress. Many research units have adopted single-point diamond turning, grinding, extreme ultraviolet lithography, LIGA and other technologies for processing Components with nanoscale feature structures or ultra-precise surfaces have been discovered, important progress has been made in theoretical research and engineering applications, and new processing technologies are constantly being produced in combination with basic traditional processing techniques, but some of them have also been exposed. Inadequacies, such as: low stability of processing technology, low device yield and reliability, etc. One of the important reasons for the formation of the problem is the lack of corresponding testing methods

During the Tenth Five-Year Period, my country began to pay attention to the research of micro-nano testing technology, and made some progress in high-precision testing such as optics and scanning probes. There are many restrictions

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