Composite measurement system and measurement method for micro-array complex surface optical element
A technology of complex curved surfaces and optical components, applied in the field of microstructure topography testing, can solve the problems of lack of testing methods, short time, low device yield and reliability, etc., to expand the measurement range, improve the measurement speed, and improve the measurement accuracy. Effect
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[0042] The composite measurement system and measurement method of the microarray-type complex curved optical element of the present invention will be described in detail below with reference to the embodiments and drawings.
[0043] The composite measurement system of the microarray-type complex curved optical element of the present invention combines optical microscopy interference technology and scanning probe technology. The cantilever probe adopts the new self-excitation / self-induction tuning fork probe Akiyama probe of Swiss Nanosensors. Needle, without the need for traditional optical signal detection part, design a compact probe, build a new measurement system, so as to realize the combination of optical measurement and mechanical measurement, the combination of non-contact measurement and contact measurement, and the whole field measurement and single point The combination of scanning measurement combines large-range, high vertical resolution, low horizontal resolution mea...
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