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Method for preparing high-quality single/double-layer controllable molybdenum disulfide

A molybdenum disulfide, double-layer technology, applied in the field of two-dimensional molybdenum disulfide preparation, can solve the problems of poor controllability, harsh preparation conditions, and repeatability to be improved.

Active Publication Date: 2014-09-24
UNIV OF SCI & TECH OF CHINA
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0003] At present, the preparation methods of two-dimensional molybdenum disulfide mainly include micromechanical exfoliation method, lithium ion intercalation method, molybdenum layer sulfurization method and molybdenum compound (such as (NH 4 ) 2 MoS 4 ) high-temperature pyrolysis method, etc. These methods either have low output and poor controllability, or the process is more complicated, the preparation cost is higher, and it is difficult to obtain high-quality two-dimensional molybdenum disulfide on a large scale
The chemical vapor deposition method using molybdenum oxide and molybdenum pentachloride powder as the molybdenum source can meet the large-scale production. It is a kind of two-dimensional molybdenum disulfide preparation method worth exploring. The current defect is that the preparation conditions are harsh, and Repeatability could be improved

Method used

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  • Method for preparing high-quality single/double-layer controllable molybdenum disulfide
  • Method for preparing high-quality single/double-layer controllable molybdenum disulfide
  • Method for preparing high-quality single/double-layer controllable molybdenum disulfide

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Experimental program
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Effect test

Embodiment 1

[0034] The surface will contain about 250nm thick SiO 2 Put the Si sheet of the first layer into a mixture of alcohol and acetone and ultrasonically clean it for 5 minutes, then clean it with a deionized water solution, and dry it with nitrogen;

[0035] Cut molybdenum sheets with a purity of 99.99% into strips of 3×5 mm, put them in a mixture of alcohol and acetone and ultrasonically clean them for 5 minutes, then clean them with deionized water and dry them with nitrogen;

[0036] The dried SiO 2 The / Si sheet and the strip-shaped molybdenum sheet are put into the ceramic boat at the same time, and the distance between the two is 2cm. Push the ceramic boat into the high temperature zone of the quartz tube of the tube furnace, wherein the outer diameter of the quartz tube is 60mm and the inner diameter is 54mm.

[0037] The sulfur powder that is 99.5% and the quality is put into a new ceramic boat with a purity of 99.5%, and the ceramic boat is placed in the low temperature...

Embodiment 2

[0043] Surface containing 250nm thick SiO 2 Put the Si sheet of the first layer into a mixture of alcohol and acetone and ultrasonically clean it for 5 minutes, then clean it with a deionized water solution, and dry it with nitrogen;

[0044] Cut molybdenum sheets with a purity of 99.99% into strips of 3×5 mm, put them in a mixture of alcohol and acetone and ultrasonically clean them for 5 minutes, then clean them with deionized water and dry them with nitrogen;

[0045] The dried SiO 2 The / Si sheet and the strip-shaped molybdenum sheet are put into the ceramic boat at the same time, and the distance between the two is 2cm. Push the ceramic boat into the high temperature zone of the quartz tube of the tube furnace, wherein the outer diameter of the quartz tube is 60mm and the inner diameter is 54mm.

[0046] The sulfur powder that is 99.5% and the quality is put into a new ceramic boat with a purity of 99.5%, and the ceramic boat is placed in the low temperature zone of the...

Embodiment 3

[0052] The surface will contain about 250nm thick SiO 2 Put the Si sheet of the first layer into a mixture of alcohol and acetone and ultrasonically clean it for 5 minutes, then clean it with a deionized water solution, and dry it with nitrogen;

[0053] Cut molybdenum sheets with a purity of 99.99% into strips of 3×5 mm, put them in a mixture of alcohol and acetone and ultrasonically clean them for 5 minutes, then clean them with deionized water and dry them with nitrogen;

[0054] The dried SiO 2 The / Si sheet and the strip-shaped molybdenum sheet are put into the ceramic boat at the same time, and the distance between the two is 2cm. Push the ceramic boat into the high temperature zone of the quartz tube of the tube furnace, wherein the outer diameter of the quartz tube is 60mm and the inner diameter is 54mm.

[0055] The sulfur powder that is 99.5% and the quality is put into a new ceramic boat with a purity of 99.5%, and the ceramic boat is placed in the low temperature...

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Abstract

The invention relates to a method for preparing layered molybdenum disulfide. The layered molybdenum disulfide is in a single-layer or double-layer structure, wherein a chemical vapor deposition method is adopted, elemental molybdenum metal and powdered sulfur is taken as a source, two-dimensional molybdenum disulfide is deposited on the surface of a substrate, the preparation parameters such as deposition temperature and growth time are optimized, and controllable growth of the single-layer or double-layer structure of the high-quality molybdenum disulfide is realized.

Description

technical field [0001] The present invention relates to a preparation method of two-dimensional molybdenum disulfide, which is specifically to prepare high-quality single-layer or double-layer molybdenum disulfide under high temperature conditions by using elemental molybdenum metal source and elemental sulfur source, which is suitable for large-area high-quality two-dimensional molybdenum disulfide Preparation of molybdenum sulfide. Background technique [0002] Due to the unique structure of the two-dimensional graphene material, it exhibits excellent properties such as low resistivity, high carrier mobility, high thermal conductivity and high light transmittance, so it is widely used in microelectronics, energy storage devices, sensors, Many application fields such as flat panel displays and solar cells have broad application prospects. Since its discovery in 2004, great efforts have been made in the preparation methods and applications of graphene. However, graphene is...

Claims

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Application Information

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IPC IPC(8): C01G39/06
Inventor 廖源周献亮周朝迅董振超
Owner UNIV OF SCI & TECH OF CHINA
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