Integrated seawater chlorophyll microfluidic chip sensor and manufacturing method thereof

Abstract

An integrated seawater chlorophyll microfluidic chip sensor capable of enhancing the anti-interference ability and improving the fluorescence detection efficiency adopts the technical scheme that the integrated seawater chlorophyll microfluidic chip sensor is characterized by consisting of a Si-PIN detector (1), a 6H-SiC / ITO / SiO2 layer (3), a reflecting and welding layer (4), an LED chip (5), a glass plate (6), a PDMS microfluidic channel (7) and a coated reflector (8), wherein the Si-PIN detector (1), the 6H-SiC / ITO / SiO2 layer (3), the reflecting and welding layer (4), the LED chip (5), the glass plate (6), the PDMS microfluidic channel (7) and the coated reflector (8) are sequentially connected from bottom to top. The invention also discloses a method for manufacturing integrated seawater chlorophyll microfluidic chip sensor.

Description

technical field [0001] The invention belongs to the field of seawater chlorophyll microfluidic chip sensor devices, in particular to an integrated seawater chlorophyll microfluidic chip sensor capable of enhancing anti-interference ability and improving fluorescence detection efficiency and a manufacturing method thereof. Background technique [0002] Chlorophyll content is an important indicator reflecting the ecological environment of seawater, based on which the ecology and pollution of the marine environment can be estimated. Therefore, accurate and rapid measurement of seawater chlorophyll is of great significance. [0003] At present, the more typical traditional method is shown in patent 201110271796.0. The system consists of LED array light source, lens group, visible light filter, focusing lens (I and II), bandpass filter, sample cell and PMT. Compared with integrated components , the system is large in size, complex in structure, susceptible to interference from ex...

AI Technical Summary

Problems solved by technology

[0003] At present, the more typical traditional method is shown in patent 201110271796.0. The system consists of LED array light source, lens group, visible light filter, focusing lens (I and II), bandpass filter, sample cell and PMT. Compared with integrated components , the system is large in size, complex in structure, susceptible to interference from external vibrations, etc., and the complex modulation and data processing parts at the back end of the system also increase the cost of the system; in addition, the transmissive optical path cannot avoid the excitation light at 685nm. interference

Images