Integrated seawater chlorophyll microfluidic chip sensor and manufacturing method thereof
A microfluidic chip and chlorophyll technology, applied in chemical instruments and methods, laboratory utensils, laboratory containers, etc., can solve the problems of increased system cost, complex structure and large volume in the modulation and data processing parts, and achieve convenient Array integration, small size and high detection efficiency
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[0022] figure 1 Among them, an integrated seawater chlorophyll microfluidic chip sensor consists of Si-PIN detector 1, 6H-SiC / ITO / SiO2 layer 3, reflective and soldering layer 4, LED chip 5, glass plate 6, PDMS microfluidic channel 7 and Coating mirror 8 is made up of, wherein, described Si-PIN detector 1, 6H-SiC / ITO / SiO2 layer 3, reflection and welding layer 4, LED chip 5, glass plate 6, PDMS microfluidic channel 7, and coating Mirrors 8 are connected in order from bottom to top. Among them, 2 is the active area of the detector, and 9 is the chlorophyll molecule.
[0023] The reflective film 8 is located above the PDMS microfluidic channel 7, and the reflective film 8 can reflect and collect fluorescence while allowing excitation light to pass through. The Si-PIN detector 1 is located under the LED chip for fluorescence detection, and the 6H-SiC / ITO / SiO2 layer 3 is located above the active region 2 of the Si-PIN detector 1 for the transmission of fluorescence and excitati...
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