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Accelerometer

An acceleration sensor, magnetic sensor technology, applied in the direction of measuring acceleration, speed/acceleration/impact measurement, instruments, etc., can solve the problems of high cost, easy deformation, difficult assembly, etc., and achieves low deformation and distortion, low resonance frequency, production low cost effect

Inactive Publication Date: 2018-03-20
BEIJING JIAYUE TONGLEJI ELECTRONICS
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

However, due to the high resonance frequency of its cantilever beam, it limits and affects its sensitivity. If the cantilever arm is made too thin to reduce its resonance frequency, it is prone to deformation; at the same time, the torsional deformation of the cantilever arm will inevitably bring error, and complex structure, difficult assembly, high cost

Method used

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Embodiment Construction

[0046]Embodiments of the present invention will now be described with reference to the drawings, in which like reference numerals represent like elements. The acceleration sensor 1 provided by the present invention has the advantages of simple structure, convenient assembly, reduced resonance frequency, less distortion and deformation, and high precision.

[0047] like Figure 1-Figure 4 As shown, in the first embodiment of the acceleration sensor 1 of the present invention, it includes a housing 10, a base 20, an elastic sheet 30, a magnet 41, a magnetic sensor 42, a circuit board 50 and at least two conductive solder pins 60, wherein the magnetic The sensor 42 is made of a magnetic sensitive film, and in the present invention, the magnetic sensor 42 is preferably a GMR sensor or a TMR sensor.

[0048] The base 20 is a square structure, and the base 20 is a hollow structure, and the hollow structure of the base 20 forms an accommodating cavity 21 , of course, the shape of th...

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Abstract

The invention discloses an acceleration sensor, which comprises a base, an elastic sheet, a magnet, a magnetic sensor and at least two conductive welding pins, the magnetic sensor is composed of a magnetically sensitive film, wherein the base is a hollow structure, and the The hollow structure of the base forms an accommodating cavity, the elastic sheet is thin plate-shaped and supported on the base, the magnet or the magnetic sensor is installed on the elastic sheet, and the magnet and the magnetic sensor Corresponding to the installation, the elastic piece vibrates so that the magnet and the magnetic sensor produce relative motion, so that the magnetic sensor senses the magnetic field change generated by the magnet and outputs a differential potential; the elastic piece is in the shape of a thin plate and has a low resonance frequency. Moreover, it is not easy to deform and twist during the vibration process, so the precision is high, and the structure of the whole acceleration sensor is simple, easy to assemble, and the production cost is low.

Description

technical field [0001] The present invention relates to the technical field of micro-nano electronics, and more specifically relates to an acceleration sensor. Background technique [0002] Micro-electromechanical system (MEMS) refers to a micro-electromechanical system that integrates micro-sensors, actuators, signal processing and control circuits, interface circuits, communications and power supplies. It has the following basic characteristics: miniaturization, intelligence, multi-function, high Therefore, MEMS involves application fields such as aerospace, information communication, biochemistry, medical treatment, automatic control, consumer electronics and military affairs. Microelectronics technology can be used to manufacture integrated circuits and many sensors, and micromachining technology is very suitable for making certain pressure sensors, acceleration sensors, micropumps, microvalves, microgrooves, microreaction chambers, microactuators, micromachines, etc. A...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G01P15/105
Inventor 刘乐杰彭春雷
Owner BEIJING JIAYUE TONGLEJI ELECTRONICS