Method and equipment for preparing ultra-hard DLC coatings through PVD and HIPIMS

Abstract

The invention discloses a method and equipment for preparing ultra-hard DLC (Diamond-like Carbon) coatings through PVD (Physical Vapor Deposition) and HIPIMS (High Power Impulse Magnetron Sputtering). By adopting a multilayer film compositing technology and using a PVD process and an HIPIMS method, and through cathode and anode bias adjustment and acetylene gas flow control, and the design of the equipment for preparing the DLC coatings in an industrialized manner, that the ultra-hard DLC coatings are prepared by the equipment on surfaces of workpieces is achieved, and the coatings are ultra-high in hardness, high in friction resistance, high in wear resistance and high in self-lubricating performance. According to the method and equipment, provided by the invention, the coating process is simple; conditions for compositing the coatings are accurate and controllable; the film formation quality is high; the performance is stable; the product yield is high; and the cost is low. The coatings are ultra-hard and excellent in self-lubricating performance and the wear resistance. The equipment for the coatings is provided with four sets of large-scale coating units, is stable and reliable in production quality, can be applied to mass production, is convenient for lowering the manufacturing cost and achieves industrialization.

Description

Technical field [0001] The invention relates to the field of diamond-like coating preparation technology and equipment, and in particular to methods and equipment for preparing superhard DLC coatings using PVD and HIPIMS. Background technique [0002] The use of surface PVD (Physical Vapor Deposition) coating can greatly improve and enhance the surface properties of the workpiece, such as hardness, wear resistance, friction resistance, corrosion resistance, etc., and improve the scratch resistance, Anti-biting and other special properties. PVD coating has become an indispensable means to improve the life and efficiency of most workpieces and is widely used in various fields, and has achieved good results. When PVD coating is performed, different conditions such as workpiece material, heat treatment, processed materials, and molding methods must be considered. Otherwise, the coating performance will be affected and resources will be wasted. Therefore, it is particularly impo...

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Problems solved by technology

[0006] The United States has regarded diamond-like film materials as one of the strategic materials in the 21st century. The research, development, preparation and application of diamond-like films in the industry are advancing in depth and breadth. There are many methods for diamond-like preparation: such as ion beam assisted deposition, magnetron Sputtering, vacuum cathodic arc deposition, plasma-enhanced chemical vapor deposition, ion implantation, etc.; but different preparation methods, DLC film composition, structure and performance are very different, high-power pulse magnetron sputtering in the prior art Target (high power impuls magnetron sputter), referred to as HIPIMS and PVD technology has the following shortcomings: 1. It is difficult to realize the practical application of large-scale, large-area, high-quality DLC films. Most deposition equipment or devices belong to laboratory prototype equipment. The preparation cost is high; industrialized mass production is not yet possible, and the degree of industrialization is low; 2. The quality of the prepared DLC coating is unstable, the coating adhesion is poor, and the film thickness is extremely thin (about 1 μm), which cannot meet the requirements of high motion pay, high The quality requirements of the DLC coating on the surface of narrow workpieces with frequent friction; 3. The compatibility of simple DLC coatings in terms of hardness, friction performance and wear performance is not good

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