In-situ measurement device and method for space charges of dielectric material under electron irradiation
A technology of dielectric material and space charge, applied in measuring devices, measuring electrical variables, instruments, etc., to achieve the effect of eliminating influence, stable work and strong operability
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[0027] Such as figure 1 Shown is the in-situ measuring device for space charge of dielectric materials under electron irradiation of the present invention, which consists of a vacuum target chamber 1, an electron accelerator 2, a vacuum pumping system 3, an oscilloscope 4, an electroacoustic pulse method measuring system 6, and a sample stage 7. Composed of 8 pulse generators. Among them, the electroacoustic pulse method measurement system 6 is mainly composed of a pulse signal input interface 601, an aluminum shielding shell 602, a protection resistor 603, an aluminum electrode 604, an upper electrode 606, a signal output interface 607, a signal output circuit 608, an insulating pad 609, a piezoelectric The sensor 610 and the bottom electrode 611 are composed.
[0028] The aluminum electrode 604, upper electrode 605, dielectric material sample 5, lower electrode 611, piezoelectric sensor 610 and insulating pad 609 are stacked and connected from top to bottom and then placed ...
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Abstract
Description
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Application Information
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