Multi-sense organ integrated electronic skin and manufacturing method thereof
A technology of electronic skin and integrated electronics, which is applied in the field of machine bionics, can solve the problems of imperfect electronic skin perception function and inaccurate force measurement, and achieve the effects of good elasticity and ductility, short lag time and strong flexibility
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[0043] In order to make the object, technical solution and advantages of the present invention clearer, the present invention will be further described in detail below in conjunction with specific embodiments and with reference to the accompanying drawings.
[0044] The multi-sensory integrated electronic skin of the present invention can simultaneously detect three kinds of information of the contact force, temperature and distance of the contact object, see figure 1 , the multi-sensory integrated electronic skin of the present invention is composed of several electronic sensory units arranged on a flexible substrate, and the electronic sensory units are arranged in an array. Each electronic sensory unit includes a gate electrode 1, an active semiconductor layer 2, a source electrode 3, a thermistor layer 4 with a negative temperature coefficient, a thermistor layer 5 with a positive temperature coefficient, an elastic microneedle insulating layer 6, a leakage current Pole 7,...
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