Abstract
The invention discloses an infrared beam control chip based on an electric control liquid crystal infrared divergence planar micro-cylindrical-lens. The chip comprises an electric control liquid crystal infrared divergence planar micro-cylindrical-lens array, wherein the electric control liquid crystal infrared divergence planar micro-cylindrical-lens array comprises a liquid crystal material layer, a first liquid crystal initial orientation layer, a first electrical isolation layer, a graphical electrode layer, a first substrate, a first infrared antireflection film, a second liquid crystal initial orientation layer, a second electrical isolation layer, a common electrode layer, a second substrate and a second infrared antireflection film, the first liquid crystal initial orientation layer, the first electrical isolation layer, the graphical electrode layer, the first substrate and the first infrared antireflection film are sequentially arranged on the upper surface of the liquid crystal material layer, the second liquid crystal initial orientation layer, the second electrical isolation layer, the common electrode layer, the second substrate and the second infrared antireflection film are sequentially arranged on the lower surface of the liquid crystal material layer, the common electrode layer is composed of a homogeneous conducting film layer, and the graphical electrode layer is composed of a homogeneous conducting film layer on which rectangular hole pairs are distributed into an m*n element array. The chip can achieve electric control formation and modulation of a micro rectangular aperture array graphical optical field, can be easily matched and coupled with other infrared optical and photoelectric structures, electronic and mechanical devices and the like, and is good in environmental suitability.
Description
technical field
[0001] The invention belongs to the technical field of precision measurement and control of infrared beams, and more specifically relates to an infrared divergent plane micro-cylindrical array based on electronically controlled liquid crystals, which is electrically controlled to construct adjustable arrayed micro-rectangular light holes arranged in an orderly manner A light control chip with a patterned light field. Background technique
[0002] In recent years, the technology of columnar refraction or columnar diffraction light-diverging microlens arrays based on the surface relief profile to generate a specific form of light field constructed by the orderly arrangement of arrayed micro-rectangular light holes has been applied in many fields. . Typical infrared lithography sources such as arrayed micro-rectangular apertures in the large-scale integrated circuit lithography process, infrared direct-writing lithography sources for the fabrication of micro-re...
