Fin-type field effect transistor and formation method thereof
A fin-type field effect and transistor technology, which is applied in semiconductor devices, semiconductor/solid-state device manufacturing, electrical components, etc., can solve the problem that the carrier mobility cannot be satisfied.
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[0060] Aiming at the problem of the background technology, the present invention proposes a scheme of applying the existing topological insulator material to the fin field effect transistor.
[0061] Topological insulator (Topological Insulator, TI) is a new state of matter with strange quantum properties, and it is one of the important scientific hotspots and frontiers of physics in recent years. It is completely different from "metal" and "insulator" in the traditional sense. It is a metallic state in which the interior is insulating and the interface allows charge movement. In other words, the bulk electronic state of a topological insulator is an insulator with a gap, while its surface is a gapless metallic state. However, this gapless surface metal state is completely different from the surface state caused by surface unsaturated bonds or surface reconstruction in the general sense, that is, unlike metals in the traditional sense, the surface metal state of topological in...
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