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Ultra precision positioning workbench with nanometer resolution

A workbench and resolution technology, used in manufacturing tools, large fixed members, metal processing equipment, etc., can solve the problems of motion accuracy and positioning accuracy that are difficult to reach sub-micron or even nanometer level, and achieve light weight and displacement resolution. High efficiency and compact structure

Inactive Publication Date: 2015-03-25
李志刚
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  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

Due to mechanical friction, clearance, crawling and other reasons, its motion accuracy and positioning accuracy are difficult to reach sub-micron or even nanometer level

Method used

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  • Ultra precision positioning workbench with nanometer resolution

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Experimental program
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Effect test

Embodiment Construction

[0011] As shown in the figure, the main body of the present invention is composed of a flexible hinge worktable and a piezoelectric ceramic micro-displacer. It is detected by a dual-frequency laser interferometer SJD5, and a closed-loop control system is composed of a computer and a phase meter; a digital signal is given by the computer, D / A is converted and amplified to generate a variable voltage of 0~1000V with a step length of 1V, which drives the piezoelectric ceramic to expand and contract, and then the piezoelectric ceramic drives the flexible hinge worktable to make a micro displacement.

[0012] As a preferred solution, the control part adopts PC control.

[0013] Micro-actuator-the choice of piezoelectric ceramics.

[0014] The piezoelectric ceramic PZT1 developed by the Institute of Acoustics of the Chinese Academy of Sciences and the piezoelectric ceramic PZT2 manufactured by the German PI company in the early 1990s are used as the driving parts. The range of these t...

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Abstract

The invention relates to a positioning workbench, in particular to an ultra precision positioning workbench with nanometer resolution. The ultra precision positioning workbench with the moving precision and positioning precision can be in the sub micron or even nanometer level. The workbench comprises a soft hinge workbench body and a piezoelectric ceramic micro displacement device and is characterized in that a dual frequency laser interferometer (SJD5) is adopted for detection, and a loop control system is obtained through a computer and a phase meter; digital signals are transmitted the computer and are converted and amplified through a D / A converter, the 0 to 1000V variable voltage with the step of 1 V is produced to drive the piezoelectric ceramic to stretch, and the piezoelectric ceramic drives the soft hinge workbench body to perform micro displacement.

Description

technical field [0001] The invention relates to a positioning worktable, in particular to an ultra-precise positioning workbench with nanoscale resolution. Background technique [0002] In the 21st century, nanometer measurement has a wide range of needs. For example, in the field of microelectronics, the typical linewidth in 1999 was 180nm, by 2006 the typical linewidth will be 100nm, and in 2009 the typical linewidth will be 70nm. The positioning accuracy should be 1 / 3~1 / 4 of the line width. In the biological field, the scale of DNA is in the range of 2-3nm. Therefore, micro-nano positioning technology has important applications in the fields of ultra-finishing, microelectronics engineering, bioengineering, and nanotechnology. [0003] The traditional micro-motion table adopts mechanical transmission micro-displacement drivers such as precision screw pair and rolling (or sliding) guide rail, precision spiral wedge mechanism, turbine concave wheel mechanism, gear lever me...

Claims

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Application Information

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IPC IPC(8): B23Q1/34
CPCB23Q1/34
Inventor 李志刚
Owner 李志刚
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