Non-scanning super diffraction resolution terahertz microscope
A super-diffraction and terahertz technology, applied in the field of terahertz imaging research, can solve the problems of low energy utilization and the need for mechanical scanning, and achieve the effects of improving modulation intensity and modulation accuracy, eliminating image distortion, and fast imaging speed
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[0032] The following non-limiting examples illustrate the invention.
[0033] Relevant description of the present invention:
[0034] 1. When the terahertz wave signal generated by the terahertz source module and the detection point of the terahertz detector are on the same side of the sample to be tested, a reflective non-scanning super-diffraction resolution terahertz microscope is formed;
[0035] When the terahertz wave signal generated by the terahertz source module and the detection point of the terahertz detector are on the opposite side of the sample to be measured, a transmission non-scanning super-diffraction resolution terahertz microscope is formed;
[0036] 3. The terahertz source can be a terahertz pulse source or a terahertz wave continuous source; the terahertz detector can be selected according to the terahertz source, and can be a coherent detector or an incoherent detector.
[0037] 4. The thickness of the semiconductor or phase-change film is less than ...
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