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A non-scanning superdiffraction-resolution terahertz microscope

A super-diffraction and terahertz technology, applied in the field of terahertz imaging research, can solve the problems of requiring mechanical scanning and low energy utilization, and achieve the effect of improving modulation intensity and modulation accuracy, fast imaging speed, and good image quality.

Inactive Publication Date: 2017-02-22
INST OF FLUID PHYSICS CHINA ACAD OF ENG PHYSICS
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

When the coded laser signal generated by the coded laser generation module is irradiated to the terahertz space modulation module, the terahertz wave generated by the terahertz source module cannot pass through or pass through the terahertz space modulation module to process the measured sample information, which solves the problem of traditional super Problems of low energy utilization and mechanical scanning in diffraction-resolved imaging

Method used

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  • A non-scanning superdiffraction-resolution terahertz microscope
  • A non-scanning superdiffraction-resolution terahertz microscope
  • A non-scanning superdiffraction-resolution terahertz microscope

Examples

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Embodiment Construction

[0032] The following non-limiting examples illustrate the invention.

[0033] Relevant description of the present invention:

[0034] 1. When the terahertz wave signal generated by the terahertz source module and the detection point of the terahertz detector are on the same side of the sample to be tested, a reflective non-scanning super-diffraction resolution terahertz microscope is formed;

[0035] When the terahertz wave signal generated by the terahertz source module and the detection point of the terahertz detector are on the opposite side of the sample to be measured, a transmission non-scanning super-diffraction resolution terahertz microscope is formed;

[0036] 3. The terahertz source is either a terahertz pulse source or a terahertz wave continuous source; the terahertz detector is selected according to the terahertz source, and can be a coherent detector or an incoherent detector.

[0037] 4. The thickness of the semiconductor or phase-change film is less than 100...

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Abstract

The invention belongs to the technical field of terahertz imaging studies, and particularly relates to a non-scanning super diffraction resolution terahertz microscope. The non-scanning super diffraction resolution terahertz microscope aims at the problems existing in the prior art, when an encoding laser signal generated by an encoding laser generation module irradiates a terahertz spatial modulation module, terahertz waves generated by a terahertz source module cannot transmit or transmit the terahertz spatial modulation module, the information of a tested sample is processed, and an image of the tested sample is restored. The non-scanning super diffraction resolution terahertz microscope comprises the encoding laser generation module, the terahertz spatial modulation module, the terahertz source module and a terahertz image processing module, the encoding laser signal is generated by the encoding laser generation module to modulate terahertz wave signals, the terahertz waves carrying the information of the tested sample pass through a terahertz detector and are transmitted to a processor to be processed, and the image of the tested sample is restored.

Description

technical field [0001] The invention belongs to the technical field of terahertz imaging research, in particular to a non-scanning super-diffraction resolution terahertz microscope. Background technique [0002] There are resonance interactions between the photon energy of terahertz waves and the vibration / rotation energy level of macromolecules, the weak interaction energy between molecules, the vibration energy level of crystal lattice skeleton, and the electron-lattice interaction energy in solids; Therefore, THz waves have broad application prospects in the field of material science research, and can provide potentially powerful means for revealing new phenomena in physics, chemistry, and biology. [0003] The properties of matter at the microscopic scale are directly related to or even determine the macroscopic properties of the material. Therefore, the experimental research of material science urgently needs diagnostic methods with microscopic resolution capabilities. ...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G01J3/28
Inventor 孟坤朱礼国刘乔钟森城翟召辉李江杜良辉李泽仁彭其先
Owner INST OF FLUID PHYSICS CHINA ACAD OF ENG PHYSICS
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