Laser processing system and method for liquid film protection

Abstract

The invention discloses a liquid film protecting laser processing system and method. According to the liquid film protecting laser processing system, a workbench where a workpiece is fixed is installed in a container, and lasers focus on the surface of the workpiece; a main spray nozzle and an auxiliary spray nozzle are matched, when the main spray nozzle and the auxiliary spray nozzle are compared, the intersection angle between the center line of the main spray nozzle and the horizontal plane is smaller, the distance between the main spray nozzle and the surface of the workpiece is smaller, the jet flow pressure of the main spray nozzle ranges from 5Mpa to 50Mpa, and the laser focus point is located in an area of intersection between a jet flow beam of the main spray nozzle and the surface of the workpiece; the auxiliary spray nozzle is opposite to the main spray nozzle, and is located on the other side of a laser beam, and the jet flow pressure of the auxiliary spray nozzle ranges from 0.05Mpa to 0.2Mpa. The liquid film protecting laser processing method comprises the steps that a thin liquid film protecting layer which stably flows to the outer edge of the workpiece is formed by jet flow sprayed by the main spray nozzle and the auxiliary spray nozzle on the surface of the workpiece, and the laser beam passes through a liquid film and focuses on the surface of the workpiece to conduct processing. According to the liquid film protecting laser processing system and method, the thin water film which continuously flows takes cuttings and heat away, the high-pressure jet flow can also remove materials which are softened through heating, the continuous liquid film covers the surface of the whole workpiece, adhesion of suspended particles is avoided, and the cleanliness is improved.

Description

technical field [0001] The invention relates to the technical field of laser processing, in particular to a laser processing system and method for liquid film protection. Background technique [0002] The laser is an effective tool for both macro and submicron fabrication because its small, high-energy beam meets all the basic needs of material processing. However, thermal damage is unavoidable in laser processing. Although ultrashort lasers can reduce thermal effects on materials, they suffer from low material removal rates and high photon costs. In recent years, scholars have been conducting research on laser processing methods to reduce thermal damage, among which the traditional underwater laser processing method is a better choice. However, during the underwater laser processing process, the laser heating causes ripples and bubbles in the aqueous solution, which disturbs the transmission of the laser, affects the stability of the underwater laser processing process an...

AI Technical Summary

Problems solved by technology

However, in the process of underwater laser processing, the laser heating causes ripples and bubbles in the aqueous solution, which disturbs the transmission of the laser, affects the stability of the underwater laser processing process and reduces the processing quality.

[0003] In addition, when the processed sample has multiple cutting lines, the vacuum chuck used to fix the sample will absorb the solution, and the surface of the processed sample will be dry, resulting in the adhesion of suspended particles generated during processing, affecting its surface cleanliness

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