Method and device for recycling light components in trichlorosilane synthesis material
A technology of trichlorosilane and light components, applied in the direction of halogenated silicon compounds, halogenated silanes, etc., can solve the problems of waste trichlorosilane, environmental pollution, increase in raw material cost, etc.
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Embodiment 1
[0066] The trichlorosilane synthetic material synthesized in the process of producing polysilicon by adopting the improved Siemens method, by weight percentage, the trichlorosilane synthetic material includes 0.01% of HCL, 2% of DCS, 88% of TCS, 10% of TET and metal impurities such as boron and phosphorus. use figure 1 The shown device rectifies and purifies the trichlorosilane synthetic material, and recycles the light components of trichlorosilane. Specific steps are as follows:
[0067] The trichlorosilane synthetic material enters the rectification tower of the ternary system through the feed port, and after multi-stage rectification treatment, the TET and heavy component impurities are separated through the rectification tower tank, and are collected through the side line of the rectification tower. Go out and isolate the TCS with a purity of more than 99%, and separate the light component impurities containing about 70% DCS by the top of the rectifying tower; After mi...
Embodiment 2
[0069] In the process of producing polysilicon by the improved Siemens method, based on 5 tons of trichlorosilane synthetic material synthesized per hour, the DCS content in the trichlorosilane synthetic material is 2%, so that 100kg of DCS is produced per hour. By implementing the closed loop process adopted in 1 (recycling process of light components in trichlorosilane synthetic material), the DCS is all converted into TCS, and the production of TCS can be increased by about 134kg per hour. At the same time, the consumption of lye and water in the three-waste treatment process is reduced because the light component impurities are not discharged, and the production of industrial solid waste and industrial wastewater is also reduced.
[0070] In summary, the method and device for recycling light components in trichlorosilane synthetic materials proposed by the present invention solve the problems of wasting raw materials and endangering the environment in the existing treatment...
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