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Method and device for recycling light components in trichlorosilane synthesis material

A technology of trichlorosilane and light components, applied in the direction of halogenated silicon compounds, halogenated silanes, etc., can solve the problems of waste trichlorosilane, environmental pollution, increase in raw material cost, etc.

Active Publication Date: 2017-03-29
XINJIANG DAQO NEW ENERGY
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0004] When carrying out the above method, the inventors found at least the following problems in the prior art: the use of hydrolysis and lye to treat the light components in the trichlorosilane synthetic material not only wastes the dichlorodihydrogen silicon that can be used as a raw material for polysilicon production , trichlorosilane, which increases the cost of raw materials, and the solid waste such as silicon dioxide produced by hydrolysis, and the industrial wastewater produced by acid-base neutralization of acid gases such as hydrogen chloride have caused great pollution to the environment

Method used

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  • Method and device for recycling light components in trichlorosilane synthesis material

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Embodiment 1

[0066] The trichlorosilane synthetic material synthesized in the process of producing polysilicon by adopting the improved Siemens method, by weight percentage, the trichlorosilane synthetic material includes 0.01% of HCL, 2% of DCS, 88% of TCS, 10% of TET and metal impurities such as boron and phosphorus. use figure 1 The shown device rectifies and purifies the trichlorosilane synthetic material, and recycles the light components of trichlorosilane. Specific steps are as follows:

[0067] The trichlorosilane synthetic material enters the rectification tower of the ternary system through the feed port, and after multi-stage rectification treatment, the TET and heavy component impurities are separated through the rectification tower tank, and are collected through the side line of the rectification tower. Go out and isolate the TCS with a purity of more than 99%, and separate the light component impurities containing about 70% DCS by the top of the rectifying tower; After mi...

Embodiment 2

[0069] In the process of producing polysilicon by the improved Siemens method, based on 5 tons of trichlorosilane synthetic material synthesized per hour, the DCS content in the trichlorosilane synthetic material is 2%, so that 100kg of DCS is produced per hour. By implementing the closed loop process adopted in 1 (recycling process of light components in trichlorosilane synthetic material), the DCS is all converted into TCS, and the production of TCS can be increased by about 134kg per hour. At the same time, the consumption of lye and water in the three-waste treatment process is reduced because the light component impurities are not discharged, and the production of industrial solid waste and industrial wastewater is also reduced.

[0070] In summary, the method and device for recycling light components in trichlorosilane synthetic materials proposed by the present invention solve the problems of wasting raw materials and endangering the environment in the existing treatment...

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Abstract

The invention discloses a method and a device for recycling light components in a trichlorosilane synthetic compost, relates to the technical field of polycrystalline silicon production and aims at solving the problems of raw material waste and environmental damage of the existing process for treating the light components in the trichlorosilane synthetic compost. The method mainly comprises the following steps: performing rectification processing on the trichlorosilane synthetic compost to obtain lateral line components, light components and heavy components; performing a counter-disproportionation reaction on the light components and TET to obtain a first product mixture; removing boron compounds in the first product mixture to obtain a second product mixture; performing fractionation processing on the second product mixture to obtain a first component containing DCS and a second component containing TCS and TET, wherein the first component contains 75-85% of dichlorosilane, and the second component contains trichlorosilane and silicon tetrachloride. The method is mainly used for recycling the light component impurities in the trichlorosilane synthetic compost.

Description

technical field [0001] The invention relates to the field of polysilicon production, in particular to a method and device for recycling light components in trichlorosilane synthetic materials. Background technique [0002] Polysilicon is a very important intermediate product in the silicon product industry chain. It is the main raw material for the manufacture of silicon polished wafers, solar cells and high-purity silicon products, and the most basic raw material in the information industry and new energy industry. The improved Siemens method to produce polysilicon is currently the most mature, most widely used and fastest expanding technology. The improved Siemens method is to use chlorine and hydrogen to synthesize hydrogen chloride (or purchased hydrogen chloride), hydrogen chloride and industrial silicon powder (coarse silicon) to synthesize trichlorosilane at high temperature to obtain trichlorosilane synthetic material, and then synthesize trichlorosilane The materia...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): C01B33/107
Inventor 马锐
Owner XINJIANG DAQO NEW ENERGY