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Method for preparing molybdenum target

A molybdenum target and molybdenum powder technology is applied in the field of thin film material preparation to achieve the effects of simple and low operation, improved safety and improved purity

Inactive Publication Date: 2015-04-29
YANTAI SHIELD ADVANCED MATERIALS
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

Although a variety of molybdenum target preparation methods have been developed in recent years, in general, these methods have not fundamentally changed the problems of high energy consumption, poor process safety and high cost of molybdenum targets.

Method used

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  • Method for preparing molybdenum target

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0023] Purchase commercially available purity of 99.95%, average particle size of 2.8 μm micron molybdenum powder and purity of 99.9%, average particle size of 100nm nano-molybdenum powder, weighing 98kg micron molybdenum powder and 2kg nano-molybdenum powder, in the V-shaped mixer Mix in medium for 60 minutes; put the evenly mixed molybdenum powder into the rubber sheath, and use a cold isostatic press to form it under a pressure of 240MPa. The formed molybdenum billet is sintered in a vacuum sintering furnace: firstly, the temperature is raised to 800°C for 2 hours; then the temperature is raised from 800°C to 1200°C for 2 hours, and kept at 1200°C for 1 hour; and then the temperature is raised from 1200°C to 1400°C for 2 hours. ℃, and kept at 1400℃ for 4 hours; then heated from 1400℃ to the highest temperature of 1950℃ in 6 hours, and kept at the highest temperature for 23h. After sintering, it is hot rolled at 1400°C, vacuum heat treated at 900°C for 3 hours, and machined ...

Embodiment 2

[0025] Purchase commercially available micron molybdenum powder with a purity of 99.95% and an average particle size of 1 μm and a nanometer molybdenum powder with a purity of 99.9% and an average particle size of 50 nm. Weigh 95 kg of micron molybdenum powder and 5 kg of nanometer molybdenum powder in a V-type mixer. 60min; put the evenly mixed molybdenum powder into the rubber sheath, and use a cold isostatic press to form it under a pressure of 170MPa. The formed molybdenum billet is sintered in a vacuum sintering furnace: firstly, the temperature is raised to 800°C for 2 hours; then the temperature is raised from 800°C to 1200°C for 2 hours, and kept at 1200°C for 1 hour; and then the temperature is raised from 1200°C to 1400°C for 2 hours. ℃, and kept at 1400℃ for 4 hours; then heated from 1400℃ to the highest temperature of 1800℃ over 6 hours, and kept at the highest temperature for 35h. After sintering, it is hot rolled at 1450°C, vacuum heat treated at 1000°C for 5 hou...

Embodiment 3

[0027] Purchase commercially available micron molybdenum powder with a purity of 99.95% and an average particle size of 5 μm and a nanometer molybdenum powder with a purity of 99.9% and an average particle size of 200 nm. Weigh 99 kg of micron molybdenum powder and 1 kg of nanometer molybdenum powder in a V-type mixer. 60min; put the uniformly mixed molybdenum powder into the rubber sheath, and use a cold isostatic press to form it under a pressure of 250MPa; the formed molybdenum billet is sintered in a vacuum sintering furnace: firstly, the temperature is raised to 800°C for 2 hours; then Raise the temperature from 800°C to 1200°C in 2 hours, and keep it at 1200°C for 1 hour; then raise the temperature from 1200°C to 1400°C in 2 hours, and keep it at 1400°C for 4 hours; ℃, and kept at the highest temperature for 18h. After sintering, it is hot-rolled at 1300°C, vacuum heat-treated at 1100°C for 2 hours, and machined into a molybdenum target. The purity of the obtained molyb...

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Abstract

The invention discloses a method for preparing a molybdenum target. By introducing a small amount of nano molybdenum powder, not only is the forming density improved, but also the sintering activity of the powder is improved, and the sintering temperature is reduced; meanwhile due to vacuum sintering, hydrogen is not used, a function of reducing the sintering temperature is achieved due to vacuum sintering, and a certain purification function is also achieved. The whole preparation method is simple and safe in process, free of waste emission and belongs to environment-friendly techniques; and most importantly, the energy consumption can be greatly reduced, the production efficiency is improved, and the capacity of sintering equipment can be increased by more than 20%. The method has the beneficial effects that the method has remarkable competitive advantages and profit margin in aspects such as manufacturing cost, product property, large-scale production, safety and environment protection.

Description

technical field [0001] The invention belongs to the technical field of film material preparation and relates to a method for preparing a molybdenum target, in particular to a sintering process using nanotechnology to improve the performance of the molybdenum target and low energy consumption. Background technique [0002] Molybdenum sputtering targets are mainly used for flat panel displays, electrode and wiring materials for thin-film solar cells, and barrier layer materials for semiconductors. These are based on molybdenum's high melting point, high electrical conductivity, low specific impedance, good corrosion resistance, and good environmental performance. In the past, chrome was mainly used as the wiring material of flat-panel displays, but as the size and precision of flat-panel displays increase, materials with lower specific impedance are increasingly required. In addition, environmental protection is also an issue that must be considered. Molybdenum has the advan...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C23C14/34B22F1/00B22F3/10B22F3/16
Inventor 侯庆龙邱春霞豆帆朱洪维刘海燕
Owner YANTAI SHIELD ADVANCED MATERIALS
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