High-voltage bidirectional ESD protective device based on longitudinal NPN structure
An ESD protection, high-voltage technology, applied in the direction of electric solid-state devices, semiconductor devices, electrical components, etc., can solve the problems of high breakdown voltage, large leakage current, etc., to achieve high matching, high maintenance voltage, and improve flexibility.
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[0025] Below in conjunction with accompanying drawing and specific embodiment the present invention will be described in further detail:
[0026] The example of the present invention designs a high-voltage bidirectional ESD protection device based on a longitudinal NPN structure. Through the mirror-symmetrical NPN structure, without adding an additional mask, not only the bidirectional protection for ESD pulses can be realized, but also can be adjusted separately The width of the base region of a single NPN structure can change the maintenance voltage in the forward and reverse working modes respectively, improving the flexibility of the device use environment.
[0027] A high-voltage bidirectional ESD protection device based on a vertical NPN structure, such as figure 1 The schematic cross-sectional view of the internal structure of the shown example of the present invention includes a P-type substrate (111), and a first high-voltage N-type well (109) and a second high-voltag...
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