Method for synthesizing graphene by catalyzing solid carbon source with two-stage process at normal pressure
A solid carbon source and synthetic graphite technology, which is applied in the field of graphene synthesis by CVD, can solve the problems of high energy consumption, unsuitability for industrial production, and high equipment requirements, and achieve the effects of low energy consumption, low cost, and high quality
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[0017] The present invention provides a kind of preparation method, the present invention is described in detail in conjunction with accompanying drawing, comprises the following steps:
[0018] (1) cleaning SiO2 2 / Si substrate and metal substrate:
[0019] ① SiO with a certain size 2 Put the / Si substrate in clean acetone and isopropanol in sequence for ultrasonic cleaning for 5 minutes, rinse with deionized water, and dry.
[0020] ②Metal substrates refer to copper foil. Put a certain size of copper foil into clean dilute acetic acid, acetone, and isopropanol in order to ultrasonically clean it for 5 minutes, rinse it with deionized water, and dry it.
[0021] (2) SiO processed in step 1) 2 The / Si substrate is placed in a magnetron sputtering apparatus, using magnetron sputtering technology, optimizing the sputtering conditions, and depositing a layer of cobalt film. A certain thickness of amorphous carbon is then sputtered on the cobalt film.
[0022] (3) SiO deposit...
example 1
[0026] Example 1: As the CVD time changes, compare the evolution of graphene films under different reaction times.
[0027] Follow steps 1) in ① and step 2) in 1cm*1cm of SiO 2 Deposit metal Co on the / Si substrate, and then deposit amorphous carbon separately for 1min; then deposit cobalt film and SiO of amorphous carbon 2 / Si sheet (amorphous carbon / cobalt film / SiO 2 / Si) and the 1cm*1cm copper foil cleaned according to the method ② in step 1) are put into the quartz tube. Exhaust the air in the reaction chamber according to step 3). incoming Ar and H 2 The numerical intervals of the flow rates are 300-600sccm and 30-80sccm respectively. The temperature in the front temperature zone is raised to 700°C, and the temperature in the back temperature zone is 1050°C. At this temperature, keep the carrier gas unchanged, and the value range of the constant temperature annealing time is 30-90min. After the amorphous carbon / cobalt film / SiO 2 / Si sheet is pushed into the central a...
example 2
[0029] Example 2: Comparison of the influence of the amount of sputtering deposition of amorphous carbon on the synthesis of graphene. Figure 5 Shown are optical micrographs and corresponding Raman spectra of graphene synthesized under the condition of sputtering amorphous carbon for different times.
[0030] Follow steps 1) in ① and step 2) in 1cm*1cm of SiO 2 Deposit metal Co on the / Si substrate, and then deposit amorphous carbon for 0.5min, 1min and 2min respectively (as shown in Figure (5a-c)); after that, deposit cobalt film and SiO of amorphous carbon 2 / Si(amorphous carbon / cobalt film / SiO 2 / Si) sheet and the 1cm*1cm copper foil cleaned according to the method ② in step 1) are put into the quartz tube. Exhaust the air in the reaction chamber according to step 3). incoming Ar and H 2 The numerical intervals of the flow rates are 300-600sccm and 30-80sccm respectively. The temperature in the front temperature zone is raised to 700°C, and the temperature in the back...
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