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High-property optothermal transformation multiple-element alloy nitride film and preparation method thereof

A light-to-heat conversion and multi-element technology, applied in metal material coating process, ion implantation plating, coating, etc., can solve problems such as optical performance degradation, binding force degradation, peeling, etc.

Active Publication Date: 2015-05-20
安徽科鑫光热技术有限公司
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

According to the Carnot cycle efficiency, the larger the temperature difference, the higher the conversion efficiency. In order to improve the light-to-heat conversion efficiency, the coating is required to be used at a higher temperature. Chemical reactions lead to a decrease in bonding force or even peeling off, and a sharp drop in optical properties

Method used

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  • High-property optothermal transformation multiple-element alloy nitride film and preparation method thereof
  • High-property optothermal transformation multiple-element alloy nitride film and preparation method thereof
  • High-property optothermal transformation multiple-element alloy nitride film and preparation method thereof

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0030] The composition is a NbTiAlSi quaternary alloy target with an equimolar ratio of 1:1:1:1. The vacuum magnetron sputtering coating process is used, and the working gas Ar and the reactive gas N2 are filled, and the uniformity is obtained by changing the working pressure and sputtering time. of different thicknesses of multielement alloy nitride films. Specifically include the following steps:

[0031] Step 1: Put the quartz glass sheet (for the film thickness test) and the polished stainless steel substrate into alcohol and deionized water for ultrasonic cleaning respectively for 15min, and repeat the above process twice;

[0032] Step 2: drying the cleaned substrate and placing it on the sample stage corresponding to the vacuum chamber, and placing the prepared quaternary alloy target on the evaporation source of the vacuum chamber and connecting the DC power source;

[0033] Step 3: Close the magnetron sputtering vacuum chamber, when the vacuum degree is lower than 1....

Embodiment 2

[0038] The composition is a NbTiAlSi quaternary alloy target with an equimolar ratio of 1:1:1:1. The vacuum magnetron sputtering coating process is used, and the working gas Ar and reactive gas N2 are filled. Uniform multielement alloy nitride films with different thicknesses were obtained. Specifically include the following steps:

[0039] Step 1: Put the quartz glass sheet (for the film thickness test) and the polished stainless steel substrate into alcohol and deionized water for ultrasonic cleaning respectively for 15min, and repeat the above process twice;

[0040] Step 2: drying the cleaned substrate and placing it on the sample stage corresponding to the vacuum chamber, and placing the prepared quaternary high-entropy alloy target on the evaporation source of the vacuum chamber and connecting the DC power source;

[0041] Step 3: Close the magnetron sputtering vacuum chamber, when the vacuum degree is lower than 1.0×10-3Pa, fill in 20sccm of Ar and 6sccm of N2;

[004...

Embodiment 3

[0046]The composition is a NbTiAlSi quaternary high-entropy alloy target with an equimolar ratio of 1:1:1:1. The vacuum magnetron sputtering coating process is used to fill the working gas Ar and reactive gas N2. By changing the working pressure and sputtering time to obtain uniform high-entropy alloy nitride films of different thicknesses. Specifically include the following steps:

[0047] Step 1: Put the quartz glass sheet (for the film thickness test) and the polished stainless steel substrate into alcohol and deionized water for ultrasonic cleaning respectively for 15min, and repeat the above process twice;

[0048] Step 2: drying the cleaned substrate and placing it on the sample stage corresponding to the vacuum chamber, and placing the prepared quaternary alloy target on the evaporation source of the vacuum chamber and connecting the DC power source;

[0049] Step 3: Close the magnetron sputtering vacuum chamber, when the vacuum degree is lower than 1.0×10-3Pa, fill wi...

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Abstract

The invention relates to a high-property optothermal transformation multiple-element alloy nitride film and a preparation method thereof. The preparation method comprises the following steps of successfully preparing a multiple-element alloy sputtering target material by adopting a powder metallurgic method and a vacuum arc melting method; preparing multiple-element alloy nitride films with different thicknesses by adopting a vacuum magnetron sputtering film coating process and changing sputtering time and working air pressure so as to provide a new material for a solar spectrum selective-absorption coating, wherein the typical structure of the solar spectrum selective-absorption coating is of a sandwich structure which includes an infrared reflecting layer, a dual-absorption layer and an anti-reflection layer, and the solar spectrum selective-absorption coating has higher absorption rate and heat stability. According to the preparation method, a single-layer multiple-element alloy nitride film is sputtered on a polished stainless steel substrate, the single-layer multiple-element alloy nitride film is detected to have higher absorption rate of 79.82% compared with other single-layer optothermal transformation films within a solar spectrum range, and the obtained multiple-element alloy nitride film is uniform in thickness and has good combining capacity and high-temperature resistant property with the substrate. The high-property optothermal transformation multiple-element alloy nitride film disclosed by the invention is suitable for a high-temperature vacuum heat-collecting pipe and has wide application prospect in the field of solar optothermal.

Description

technical field [0001] The invention relates to the field of solar photothermal application, and mainly relates to a high-performance photothermal conversion multielement alloy film and a preparation method thereof. Background technique [0002] With the increasing problems of energy shortage and environmental pollution, it is imperative to expand the field of solar energy application. Solar energy is a kind of clean and renewable energy. Photothermal conversion is one of the most effective forms of directly utilizing solar energy. The solar spectrum selective absorption coating is a medium that directly converts sunlight energy. Improving the conversion efficiency of solar energy has always been a The focus of solar thermal utilization. At present, the solar spectrum selective absorption coating for photothermal conversion is limited to use at medium and low temperature. Among them, black chrome coating and aluminum anodized coating technology are the most mature and widel...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C23C14/06C23C14/35
Inventor 张勇盛文杰杨潇刘颖芳贺亚星史家兴朱洁王聪
Owner 安徽科鑫光热技术有限公司
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