Chromium oxide and alumina composite coating and preparation method thereof
A technology of composite coating and alumina, applied in the direction of coating, metal material coating process, layered products, etc., can solve the problems of high cost and complicated preparation process, achieve improved thermophysical matching performance, and improve thermal cycle use performance effect
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Embodiment 1
[0019] A single-layer chromium oxide / alumina composite coating was deposited on 316L stainless steel by metal-organic chemical vapor deposition. Using chromium acetylacetonate and aluminum acetylacetonate as metal precursors, H 2 As a carrier gas, H 2 O as a reactive gas. The volatilization temperature of chromium acetylacetonate is 140 ° C, through the H of chromium acetylacetonate 2 The carrier gas flow rate was 30 sccm. The volatilization temperature of aluminum acetylacetonate is 120 ° C, through the H of aluminum acetylacetonate 2 The carrier gas flow rate was 10 sccm. h 2 O at a constant temperature of 25°C, through H 2 O of H 2 The flow rate is 10 sccm. Chromium acetylacetonate and aluminum acetylacetonate with H 2 O reacted in the reaction chamber, the deposition temperature was 500°C, the deposition time was 1 hour, and the pressure of the reaction chamber was 1600Pa. The thickness of the obtained single-layer chromium oxide / alumina composite coating is 1.3 ...
Embodiment 2
[0021] Deposition of multi-layer gradient chromium oxide / alumina composite coatings on 304 stainless steel by metal-organic chemical vapor deposition. Using chromium acetylacetonate and aluminum acetylacetonate as metal precursors, H 2 As a carrier gas, H 2 O as a reactive gas. The volatilization temperature of chromium acetylacetonate is 150 ° C, through the H of chromium acetylacetonate 2 The carrier gas flow rate was 30 sccm. The volatilization temperature of aluminum acetylacetonate is 120 ° C, through the H of aluminum acetylacetonate 2 The carrier gas flow rate was 10 sccm. h 2 O at a constant temperature of 25°C, through H 2 O of H 2 The flow rate is 10 sccm, the deposition temperature is 500° C., the deposition time is 0.5 hour, and the reaction chamber pressure is 1600 Pa. By changing the volatilization temperature of chromium acetylacetonate and aluminum acetylacetonate and H 2 The carrier gas flow rate is used to adjust the composition ratio of chromium oxi...
Embodiment 3
[0023] Deposition of multilayer gradient chromium oxide / alumina composite coatings on 316L stainless steel by metal-organic chemical vapor deposition. Using chromium acetylacetonate and aluminum acetylacetonate as metal precursors, H 2 As a carrier gas, H 2 O as a reactive gas. The volatilization temperature of chromium acetylacetonate is 140 ° C, through the H of chromium acetylacetonate 2 The carrier gas flow rate was 30 sccm. The volatilization temperature of aluminum acetylacetonate is 120 ° C, through the H of aluminum acetylacetonate 2 The carrier gas flow rate was 10 sccm. h 2 O at a constant temperature of 25°C, through H 2 O of H 2 The flow rate is 10 sccm, the deposition temperature is 500° C., the deposition time is 0.4 hour, and the reaction chamber pressure is 1600 Pa. By changing the volatilization temperature of chromium acetylacetonate and aluminum acetylacetonate and H 2The carrier gas flow rate is used to adjust the composition ratio of chromium oxid...
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