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X-ray flat panel detector and preparation method thereof as well as white insulation material

A technology of flat-panel detectors and insulating materials, applied in X/γ/cosmic radiation measurement, radiation measurement, radiation control devices, etc., can solve the problems of reducing photodiode conversion efficiency, photoelectric conversion efficiency decline, and light-induced degradation. Achieve high quantum detection efficiency and sensitivity

Active Publication Date: 2015-06-17
BOE TECH GRP CO LTD
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  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0004] The photodegradation effect of the amorphous silicon thin film in the photodiode causes the photoelectric conversion efficiency of the photodiode to decrease after long-term illumination
Thinning the thickness of the amorphous silicon film can help reduce the problem of light-induced degradation. However, if the thickness of the amorphous silicon film is thinned, the incident light cannot be fully absorbed, and a large amount of light will pass through the photodiode element, reducing the conversion of the photodiode. efficiency

Method used

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  • X-ray flat panel detector and preparation method thereof as well as white insulation material
  • X-ray flat panel detector and preparation method thereof as well as white insulation material

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0080] Prepare X-ray flat panel detectors, such as figure 2 shown, including the following steps

[0081] S1: Provide the substrate;

[0082] Wherein, the substrate may be a glass plate, a quartz plate or the like.

[0083] S2: forming a gate and a gate line connected to the gate on the substrate;

[0084] A thin film of a gate line layer is deposited on the substrate, and a gate and a gate line connected to the gate are formed through a patterning process.

[0085] Specifically, at first, a gate line layer film can be deposited on the substrate by sputtering or thermal evaporation, and the gate line layer film can use metals such as Cr, W, Ti, Ta, Mo, Al, Cu and alloys thereof, and then A mask plate is used to etch the gate line layer film through a patterning process, and a gate and a gate line connected to the gate are formed on the substrate.

[0086] The patterning process usually includes processes such as substrate cleaning, film formation, photoresist coating, exp...

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PUM

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Abstract

The invention discloses an X-ray flat panel detector and a preparation method thereof as well as a white insulation material. The X-ray flat panel detector comprises a film transistor base plate, an insulation layer, a pixel electrode, a photodiode, an electrode and an X-ray transfer layer, wherein the insulation layer is arranged on the film transistor base plate and has a reflection effect, and is provided with a contact whole exposing a source electrode of the film transistor base plate; the pixel electrode is arranged on the insulation layer, and is conducted with the source electrode of the film transistor base plate via the contact hole; the photodiode covers the pixel electrode; the electrode is arranged on the photodiode; the X-ray transfer layer is arranged on the electrode. The X-ray flat panel detector has high quantum detection efficiency and sensitivity.

Description

technical field [0001] The invention relates to an X-ray flat panel detector, a preparation method thereof and a white insulating material. Background technique [0002] In recent years, flat-panel detection technology has made great progress. Among them, CN101159283A describes a flat-panel detector, which reduces the cost of the flat-panel detector, thereby promoting the application of the flat-panel detector faster. [0003] The flat panel detection technology can be divided into direct and indirect two types. The key component of the indirect flat panel detector is the flat panel detector (FPD) for image acquisition, which consists of X-ray conversion layer and photodiode, thin film transistor, signal storage basic pixel unit and signal Composition of amplification and signal reading. The working principle is: X-rays are converted into visible light of about 550nm by the X-ray conversion layer, and then the visible light is converted into electrical signals by the photo...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): H01L27/146
CPCH01L27/14658G01T1/241G01T1/244H01L27/14612H01L27/14614H01L27/1462H01L27/14625H01L27/14636H01L27/14685H01L27/14689H01L27/14692
Inventor 高锦成曹占锋姚琪李正亮何晓龙张斌孔祥春张伟
Owner BOE TECH GRP CO LTD
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