Digital phase-shifting lateral shearing interferometer and optical system wave aberration measurement method

A technology of transverse shearing and digital phase shifting, which is applied in the field of optical detection, can solve the problems of inconvenient measurement, and achieve the effects of adjustable shear rate, flexible system, and variable shearing direction

Inactive Publication Date: 2015-07-29
SHANGHAI INST OF OPTICS & FINE MECHANICS CHINESE ACAD OF SCI
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Problems solved by technology

However, method (3) needs to replace (or rotate) the filter when changing the shear direction or shear rate, which brings inconvenience to the measurement and also introduces additional measurement errors

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  • Digital phase-shifting lateral shearing interferometer and optical system wave aberration measurement method
  • Digital phase-shifting lateral shearing interferometer and optical system wave aberration measurement method
  • Digital phase-shifting lateral shearing interferometer and optical system wave aberration measurement method

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Embodiment Construction

[0041] The present invention will be further described below in conjunction with the embodiments and accompanying drawings, but the protection scope of the present invention should not be limited thereby.

[0042] see first figure 1 , figure 1 It is the optical path structure diagram of the digital transverse shearing interferometer of the present invention, by figure 1 It can be seen that the digital phase-shift shearing interferometer of the present invention includes a light source 1, and along the output beam direction of the light source 1, there are a pinhole mask 2, a first spatial light modulator 4, a second spatial light modulator 6 and a two-dimensional photoelectric Detector 8, the output end of this two-dimensional photodetector 8 is connected with the input end of computer 9; The first spatial light modulator 4 and the second spatial light modulator 6 are placed on the first XYZ three-dimensional translation stage 5 respectively and on the second XYZ three-dimen...

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Abstract

Disclosed are a digital phase-shifting lateral shearing interferometer and an optical system wave aberration measurement method. The interferometer is composed of a light source, a small-hole mask, a first spatial light modulator, a second spatial light modulator, a two-dimensional photoelectric detector and a computer. The first spatial light modulator is arranged as a grating by computer programming to serve as a shearing light splitter, the second spatial light modulator is arranged as a double-window mask to serve as a filter for filtering high-order diffraction light at zero order and more than two orders, and only diffraction light at +1 order and -1 order takes part in interference. The problem that the high-order diffraction light takes part in interference is solved, the interferometer has the advantage that changeable shearing direction and adjustable shearing rate can be realized without replacing or rotating any device.

Description

technical field [0001] The invention belongs to the field of optical detection, and in particular relates to a digital phase shift transverse shear interferometer and a method for measuring wave aberration of an optical system. Background technique [0002] Transverse shear interference has the following advantages: [0003] 1) The wavefront to be measured interferes with its own lateral translation, which eliminates the need for a high-precision reference wavefront, so it has high measurement accuracy; [0004] 2) It is a common path interference system, so it is not sensitive to mechanical vibration and air disturbance, and the measurement system is stable; [0005] 3) The requirement for the spatial coherence of the light source is low. The traditional two-beam interference based on the reference wave requires that the wavefront to be measured is spatially coherent in the entire pupil to be measured, while the transverse shear interference only requires that the spatial ...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01J9/02
CPCG01J9/02G01M11/02
Inventor 戴凤钊王向朝唐锋
Owner SHANGHAI INST OF OPTICS & FINE MECHANICS CHINESE ACAD OF SCI
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