Accurate positioning controller of high-acceleration air-suspending system and control method of accurate positioning controller
A technology of precise positioning and control method, applied in the direction of control using feedback, can solve the problems of large deviation of positioning accuracy, complicated operation and high cost, achieve high precision, improve overall accuracy, and improve the effect of technical content
Inactive Publication Date: 2015-08-12
GUANGDONG INST OF AUTOMATION
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Problems solved by technology
The current positioning control of equipment such as IC packaging, laser processing, and optical inspection is controlled by a servo motor driven by an electric mechanism. The control performance is unstable, the positioning accuracy is large, and the operation is complicated and the cost is high.
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[0027] The present invention will be further described in detail below in conjunction with the accompanying drawings.
[0028] refer to figure 1 and figure 2 The precise positioning controller of the high-acceleration air suspension system shown includes a control operating system 1, a motion control card 2, a linear motor drive system 3 and a precision air suspension platform 4, and the linear motor drive system 3 includes a linear motor 31 , the position sensor 32 and the driver 33, the data signal output / input interface of the linear motor drive system 3 is connected with the remote control card 2 data signal output / input interface through a controller switching board, and the linear motor drive system 3 is located in the precision On the air suspension platform 4, the displacement function of the precision air suspension platform 4 is controlled; the operating system 1 is connected to the linear motor drive system 3 through the motion control card 2 to establish two-way ...
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The invention provides an accurate positioning controller of a high-acceleration air-suspending system and a control method of the accurate positioning controller, and relates to a positioning control device and a control method applied to IC packaging, laser machining and optical detection equipment. The accurate positioning controller comprises a control operation system, a motion control card, a linear motor driving system and a precise air-suspending platform. The linear motor driving system comprises a linear motor, a position sensor and a driver. The linear motor driving system is arranged on the precise air-suspending platform and controls the displacement of the precise air-suspending platform. The control operation system is in mutual connection with the linear motor driving system through the motion control card so as to enable bidirectional data transmission, and a man-machine conversation control and positioning controller is formed. The accurate positioning controller of the high-acceleration air-suspending system and the control method of the accurate positioning controller have a wide application prospect in fields of IC manufacturing, laser machining, optical detection and machining, biological manufacturing, micro electro mechanical systems and the like, the precision is higher, and the technology content of the advanced manufacturing industry is improved.
Description
technical field [0001] The invention relates to a positioning control device and a control method for application of IC packaging, laser processing and optical detection equipment, in particular to a precise positioning controller and a control method of a high-acceleration air suspension system. Background technique [0002] The sustainable development of the precision manufacturing industry is inseparable from advanced manufacturing processes, technologies and equipment. However, the development of precision manufacturing equipment in my country lags behind the overall development of the advanced manufacturing industry, and even more significantly lags behind the international advanced level. The most important reason is that Lack of core components and technologies with independent intellectual property rights. The high-acceleration precision system and control technology are one of the key components and core technologies of precision manufacturing equipment, which direct...
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IPC IPC(8): G05D3/12
Inventor 张昱李习峰陆英魏千洲
Owner GUANGDONG INST OF AUTOMATION