Method for bonding preparation of Ge-on-insulator (GOI) through Ge film
A technology of germanium and thin films on insulating layers, which is applied in semiconductor/solid-state device manufacturing, electrical components, circuits, etc., can solve the problems of surface micro-voids and fragility, reduce fragility, solve the problem of surface micro-voids, reduce The effect of the risk of wafer chipping
- Summary
- Abstract
- Description
- Claims
- Application Information
AI Technical Summary
Problems solved by technology
Method used
Examples
Embodiment Construction
[0028] The following examples will further illustrate the present invention.
[0029] 1. First, use SRIM 2008 software (Stopping and Range of Ions in Matter) to simulate the projection range of hydrogen ions at different energies, and then determine the implantation energy of hydrogen ions according to the required Ge thickness of the GOI top layer. Before implantation, use PECVD to deposit 90nm SiO on its surface 2 , As a protective layer for hydrogen ion implantation. Then, hydrogen ion implantation is carried out at room temperature with an LC-4 high-energy ion implanter, and the implantation dose is 5×10 16 cm -2 , The injection energy is 250keV. The vacuum level of the target chamber during injection is 10 -6 Torr, the ion beam deviates 7° from the sample normal to avoid channeling effect; at the same time, in order to prevent the self-heating effect caused by excessive beam current, the ion beam current density is controlled at 0.8μA / cm 2 about. After injection, use dilute...
PUM
Abstract
Description
Claims
Application Information
- R&D Engineer
- R&D Manager
- IP Professional
- Industry Leading Data Capabilities
- Powerful AI technology
- Patent DNA Extraction
Browse by: Latest US Patents, China's latest patents, Technical Efficacy Thesaurus, Application Domain, Technology Topic, Popular Technical Reports.
© 2024 PatSnap. All rights reserved.Legal|Privacy policy|Modern Slavery Act Transparency Statement|Sitemap|About US| Contact US: help@patsnap.com