An air-floating guide rail suitable for ultra-precision detection or ultra-high-precision processing equipment

Abstract

An air-floating guide rail suitable for ultra-precise detection or ultra-high-precision processing equipment, which relates to an air-floating guide rail. Sliding limit mechanisms (1) are respectively provided on both sides of the upper surface of a base (4). An equalizing air path (5) is provided on the upper surface of the base between the sliding limit mechanisms, and an air inlet (3) connected to the equalizing air path is arranged on any side of the base, and the high-pressure gas (7) introduced by the air inlet ) enters the nano-carbon fiber guide rail (2) on the upper surface of the base (6) through the equalizing air path, and then disperses to the upper surface of the nano-carbon fiber guide rail, and forms an air-floating air film (8) bed on the upper surface of the nano-carbon fiber guide rail by the high-pressure gas Guide rail; the present invention utilizes the microporous air-guiding function of the nano-carbon fiber guide rail to obtain the effect of air flotation technology. It does not need an additional pressure dividing groove during use, and can have good pressure compensation performance, and has a self-lubricating function. Airless movement will not hold Dead, with the characteristics of low-carbon environmental protection and never wear.

Description

【Technical field】 [0001] The invention relates to an air-floating guide rail, in particular to an air-floating guide rail suitable for ultra-precision detection or ultra-high-precision processing equipment. 【Background technique】 [0002] As is known, the air-floating guide rail uses compressed air to inject into the gap between the guide rail and the supporting part, so that there is a tension of the air film in the gap to support the moving parts for movement; commonly used materials are: alloy and wear-resistant copper, etc. As an intermediate, take the shaft diameter of 60MM as an example: air bearing guide rail performance index: guide rail stiffness: 600N / μm guide rail displacement accuracy: ±0.5μ (within stroke 400mm) maximum displacement acceleration: 5g maximum displacement speed: 5m / s longest Thread: 0-6000MM Main application occasions: high-speed, ultra-precision, ultra-precision, light-load, clean environment machine tools, machinery and devices, etc.; as an air-...

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Problems solved by technology

[0002] As is known, the air-floating guide rail uses compressed air to inject into the gap between the guide rail and the supporting part, so that there is a tension of the air film in the gap to support the moving parts for movement; commonly used materials are: alloy and wear-resistant copper, etc. As an intermediate, take the shaft diameter of 60MM as an example: air bearing guide rail performance index: guide rail stiffness: 600N / μm guide rail displacement accuracy: ±0.5μ (within stroke 400mm) maximum displacement acceleration: 5g maximum displacement speed: 5m / s longest Thread: 0-6000MM Main application occasions: high-speed, ultra-precision, ultra-precision, light-load, clean environment machine tools, machinery and devices, etc.; as an air-floating guide rail used in the field of ultra-precision testing and ultra-precision machining equipment , is also to set up mesh or criss-cross air passages on the base to form the tension of the air film between the base and the slide; at present, due to material or structural limitations, domestic air-floating guide rails generally have low rigidity, poor bearing capacity, and easy The shortcomings of damage, large air consumption, high working air pressure and no self-lubricating function have severely restricted its application range; however, its irreplaceable superior performance of high speed, ultra-high precision and no friction has made more and more In the field of application, the demand for air bearing guide rails is becoming more and more urgent. In particular, there is a need for an air bearing guide rail with high precision, high rigidity, large load capacity, low air consumption, self-lubrication and never wear to meet the needs of current and future industrial development.

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