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Evaporation source for transporting chemical precursors, and evaporation method for transporting chemical precursors using said source

A chemical precursor and evaporation source technology, applied in vacuum evaporation plating, gaseous chemical plating, coating, etc., can solve problems such as blocking delivery pipes, matrix impact, and affecting operation

Inactive Publication Date: 2015-09-16
ABENGOA SOLAR NEW TECH SA
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

The problem with this design is that when the carrier gas impinges directly on the substrate, the carrier gas actually impacts the substrate, thus creating turbulence and eventually entraining solid unvaporized species from the precursor
Therefore, the deposition on the substrate does not proceed as desired in terms of quantity and quality, moreover, these solid substances delivered by the carrier can end up clogging the delivery tubes for the carrier gas, thus damaging the equipment and affecting its operation

Method used

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  • Evaporation source for transporting chemical precursors, and evaporation method for transporting chemical precursors using said source
  • Evaporation source for transporting chemical precursors, and evaporation method for transporting chemical precursors using said source
  • Evaporation source for transporting chemical precursors, and evaporation method for transporting chemical precursors using said source

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Embodiment Construction

[0049] The object of the present invention is an evaporation source for delivering chemical precursors to a substrate on which the chemical precursors are deposited by condensation.

[0050] As can be observed in the figure, the evaporation source that is the object of the invention is formed by a hollow main tube 1 with a lower and upper removable cover 2 to provide access to the interior of the hollow main tube housing the precursors. import and export.

[0051] In particular, the main pipe 1 is made of metallic material, which may be stainless steel, copper, titanium or a combination of said materials. Furthermore, coatings made of alloys such as nickel, vanadium, molybdenum, chromium or alloys of combinations of these elements may be present.

[0052] The main tube is divided into an upper part 4 and a lower part 3 in which the precursor is housed.

[0053] In the upper part 4 there are arranged an inlet 5 through which a carrier gas inlet pipe 9 is connected to the insi...

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Abstract

The invention relates to an evaporation source for transporting chemical precursors to a substrate on which they are deposited by means of condensation, said source being formed by: a main tube (1) containing the precursors, and heating means (8). The upper part of the main tube (1) is provided with an inlet (5) and an outlet (6) for carrier gases, positioned opposite one another in the side surface (7) of the main tube (1) and aligned along a common line that extends transversely through the side surface (7) of the main tube (1). The invention also relates to an evaporation method for transporting chemical precursors, in which the carrier gases are introduced to and extracted from the main tubes (1) in an aligned manner and transversely to the side surface (7) of the tube.

Description

technical field [0001] The invention belongs to the technical field of depositing chemical precursors on substrates, in particular to the deposition technique (VTD, Vapor Transport Deposition) by transporting the vaporized precursors towards the substrate by means of a carrier gas, which technique is used, for example, to produce coatings or Make photocells. In particular, the present invention relates to an evaporation source for delivering a chemical precursor to a substrate, and an evaporation method for delivering said chemical precursor using the aforementioned evaporation source. Background technique [0002] Nowadays, different deposition techniques exist which deliver vaporized precursors or components to be deposited to the substrate on which they are deposited by condensation and which are used in In many applications such as coating or manufacturing photovoltaic cells. [0003] CSS (Close Space Sublimation) is an evaporation technique based on heating a precurso...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C23C14/22C23C14/26
CPCC23C16/4481C23C14/243C23C16/4485C23C16/46
Inventor D·桑乔·马丁内兹J·M·德尔加多·桑切斯J·A·马奎斯·普列托E·桑切斯·科尔特宗
Owner ABENGOA SOLAR NEW TECH SA
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