Method for preparing bionic micro-nano structure of butterfly wing

Abstract

The invention belongs to the technical field of micro-nano machining, and specifically to a method for preparing a bionic micro-nano structure of a butterfly wing. The method of the invention comprises the steps as follows: firstly using a spin-coating method to alternately spin a plurality of layers of photoresist with different sensitivities in turn on a silicon substrate; then using electron beam lithography to expose the photoresist; then using two developing liquids to alternatively develop the exposed sample; finally preparing hierarchical periodic or quasi-periodic bionic micro-nano structure with excellent characteristic, such as morpho bionic micro-nano structure, and so on. By combining with technologies of the plurality of layers of the photoresist and electron beam lithography, the preparation process of the invention does not need a biological template and could control the spin-coating thickness of every layer of the photoresist to achieve accuracy control of longitudinal dendritic cycle and duty ratio. The method of the invention is simple in preparation technology and could obtain the bionic micro-nano structures of the butterfly phosphorus wing with different structure parameters.

Description

technical field [0001] The invention belongs to the technical field of micro-nano processing, and in particular relates to a method for preparing a butterfly wing bionic micro-nano structure. Background technique [0002] Structural color in nature is an optical phenomenon caused by the scattering, refraction and diffraction of light by periodic dielectric materials (such as butterfly wings and beetle shells). Among them, the most influential Morpho butterfly wings have a multi-layer vertical periodic structure. It has a wide range of application prospects (including stealth technology, biosensors, environmental atmosphere monitoring, sensors for smog detection, anti-counterfeiting chromatographic marks, color printing and dyeing without chemical dyes and green production of decorations, etc.). With the development of micro-nano manufacturing technology, many bionic micro-nano structures with specific properties have been paid more and more attention, and have become the cur...

AI Technical Summary

Problems solved by technology

However, the preparation of this micro-nano structure has always been a severe challenge due to the difficulty in preparing such a multilayer vertically periodic structure by conventional processes, which restricts its practical application.

At present, there are only methods such as using biology as a template to perform atomic layer deposition (ALD, Atomic Layer Deposition) on the template, or using FIB (Focused Ion Beam) to directly process materials, which are complex and cumbersome.

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