Hybrid MEMS phase shifter

Abstract

The invention discloses a hybrid MEMS phase shifter, so as to solve problems of large phase shifter chip area, poor phase shift precision and low process tolerance in the prior art. The hybrid MEMS phase shifter comprises a base, a microstrip transmission line grounding line arranged at the bottom part of the base, a phase delay network, a phase reference network, and power distributors for being connected with the phase delay network and the phase reference network, wherein the power distributors are connected with the phase delay network and the phase reference network via single-pole single-throw switches or single-pole double-throw switches; each of the phase delay network and the phase reference network is composed of one or more MEMS variable capacitors and two connection transmission lines connected with two sides of the MEMS variable capacitors respectively and connected with parallel-type MEMS switches, and the single-pole single-throw switches or single-pole double-throw switches are the parallel-type MEMS switches. The switched-line phase shifter and the distributed phase delay network structure are combined, and advantages that the reference network and the delay network have high isolation, and phase shift is simulated and adjustable in a small range.

Description

technical field [0001] The invention belongs to the technical field of components in the field of microwave communication, radar and micro-electromechanical system (MEMS) technology, and specifically relates to a hybrid MEMS millimeter-wave terahertz phase shifter. Background technique [0002] Compared with mechanical scanning radar, phased array radar does not need to rotate its antenna, its wave scanning is more flexible, it can track more targets, and it has good anti-jamming performance. It is an important electronic scanning method. Phase shifter is a key component of phased array antenna in phased array radar, its cost and performance directly affect the cost and performance of phased array radar system. [0003] In recent years, RF MEMS phase shifters have attracted widespread attention due to their small size, low power consumption, low loss, high linearity, and low cost of mass production. Switched linear phase shifter is a main type of RF MEMS phase shifter; the...

AI Technical Summary

Problems solved by technology

[0004] (1) Multi-position switch linear phase shifter, each of which requires four single-pole single-throw switches or two single-pole double-throw switches, phase delay network and phase reference network, the chip area formed is relatively large, and the used Too many MEMS switches are not conducive to device yield;

[0005] (2) The process of switching linear phase shifters based on single-pole multi-throw switches is difficult, the design and optimization workload is large, and it is not conducive to mass processing and application;

[0006] (3) Due to the small size of the device, the millimeter wave terahertz phase shifter has the problems of strong process sensitivity and poor phase shift accuracy;

[0007] (4) Since the MEMS switch linear phase shifter is a TTD phase shifter, its bandwidth is limited in the application field of constant phase shift, especially in the millimeter-wave terahertz band, where the phase shift changes drastically with frequency

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