Hybrid MEMS phase shifter

A phase shifter and hybrid technology, which is applied in the direction of waveguide devices, optical waveguide coupling, semiconductor/solid-state device components, etc., can solve the problems of unfavorable device yield, poor phase shift accuracy, and many MEMS switches, etc., to achieve The effect of reducing the number of MEMS switches, high process tolerance type, and widening the working bandwidth

Inactive Publication Date: 2015-10-21
INST OF ELECTRONICS ENG CHINA ACAD OF ENG PHYSICS
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0004] (1) Multi-position switch linear phase shifter, each of which requires four single-pole single-throw switches or two single-pole double-throw switches, phase delay network and phase reference network, the chip area formed is relatively large, and the used Too many MEMS switches are not conducive to device yield;
[0005] (2) The process of switching linear phase shifters based on single-pole multi-throw switches is difficult, the design and optimization workload is large, and it is not conducive to mass processing and application;
[0006] (3) Due to the small size of the device, the millimeter wave terahertz phase shifter has the problems of strong process sensitivity and poor phase shift accuracy;
[0007] (4) Since the MEMS switch linear phase shifter is a TTD phase shifter, its bandwidth is limited in the application field of constant phase shift, especially in the millimeter-wave terahertz band, where the phase shift changes drastically with frequency

Method used

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Embodiment 1

[0049] Such as Figures 1 to 4 As shown, the present embodiment provides a hybrid MEMS phase shifter, including a substrate, a microstrip transmission line ground line arranged at the bottom of the substrate, a phase delay network and a phase reference network, for connecting the phase delay network and the phase reference network Power divider; the power divider is connected to the phase delay network and the phase reference network through a single-pole single-throw switch or a single-pole double-throw switch. Specifically, the two ports of the power divider are respectively connected to the phase delay network and the phase delay network. The phase reference network connection, the phase delay network and the phase reference network are mainly composed of connecting transmission lines and MEMS variable capacitors; the connecting transmission lines are two and correspond to the input and output of MEMS variable capacitors, and the single-pole single-throw switch or single...

Embodiment 2

[0075] MEMS variable capacitors are mainly used in design requirements that require large variable capacitance values, such as Figure 5 As shown, in the case of a design with little requirement on the value of the variable capacitance, parallel MEMS switches can be used to replace the MEMS variable capacitance in the phase reference network and the phase delay network.

Embodiment 3

[0077] Such as Figure 6 As shown, on the basis of replacing the MEMS variable capacitors in the phase reference network and the phase delay network with parallel MEMS switches, this implementation provides a five-bit hybrid MEMS phase shifter, which consists of Two one-bit hybrid MEMS phase shifters (refer to Example 2) are cascaded and composed of a composite bit structure, and its specific implementation is as follows:

[0078]The one on the left, where the phase shift reference phase shift generated when the parallel MEMS switch in the phase reference network is in the non-pull-down state, achieves 11.25° when the parallel MEMS switch in the phase reference network is in the analog pull-down state, Phase shifts of 22.5° and 33.75°; among them, the phase shift of 180°-11.25° occurs when the parallel MEMS switches in the phase delay network are in the non-pull-down state, and when the parallel MEMS switches in the two phase delay networks are in the In the pull-down state, ...

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Abstract

The invention discloses a hybrid MEMS phase shifter, so as to solve problems of large phase shifter chip area, poor phase shift precision and low process tolerance in the prior art. The hybrid MEMS phase shifter comprises a base, a microstrip transmission line grounding line arranged at the bottom part of the base, a phase delay network, a phase reference network, and power distributors for being connected with the phase delay network and the phase reference network, wherein the power distributors are connected with the phase delay network and the phase reference network via single-pole single-throw switches or single-pole double-throw switches; each of the phase delay network and the phase reference network is composed of one or more MEMS variable capacitors and two connection transmission lines connected with two sides of the MEMS variable capacitors respectively and connected with parallel-type MEMS switches, and the single-pole single-throw switches or single-pole double-throw switches are the parallel-type MEMS switches. The switched-line phase shifter and the distributed phase delay network structure are combined, and advantages that the reference network and the delay network have high isolation, and phase shift is simulated and adjustable in a small range.

Description

technical field [0001] The invention belongs to the technical field of components in the field of microwave communication, radar and micro-electromechanical system (MEMS) technology, and specifically relates to a hybrid MEMS millimeter-wave terahertz phase shifter. Background technique [0002] Compared with mechanical scanning radar, phased array radar does not need to rotate its antenna, its wave scanning is more flexible, it can track more targets, and it has good anti-jamming performance. It is an important electronic scanning method. Phase shifter is a key component of phased array antenna in phased array radar, its cost and performance directly affect the cost and performance of phased array radar system. [0003] In recent years, RF MEMS phase shifters have attracted widespread attention due to their small size, low power consumption, low loss, high linearity, and low cost of mass production. Switched linear phase shifter is a main type of RF MEMS phase shifter; the...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): H01P1/18B81B7/02H01Q3/30
Inventor 杜亦佳
Owner INST OF ELECTRONICS ENG CHINA ACAD OF ENG PHYSICS
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