Photosensitive unit of an uncooled infrared focal plane detector

Abstract

The invention discloses an uncooled infrared focal plane detector photoelectric sensitive unit, and aims at providing an uncooled infrared focal plane detector photoelectric sensitive unit which is high in measurement resolution and high in sensitivity. The uncooled infrared focal plane detector photoelectric sensitive unit comprises a resonant cavity which is formed by a semitransparent metal layer, an organic dielectric layer and a reflecting metal layer through superposition, and a detector unit which is fixedly arranged below the resonant cavity and used for realizing photoelectric signal conversion. At least one of the semitransparent metal layer, the organic dielectric layer and the reflecting metal layer of the resonant cavity is provided with pierced lines and / or patterns. The corresponding layers of the resonant cavity are pierced so that thermal crosstalk of the resonant cavity can be effectively reduced and spatial resolution of the detector unit can be enhanced.

Description

technical field [0001] The invention relates to an uncooled infrared focal plane detector, in particular to a photosensitive unit of the uncooled infrared focal plane detector. Background technique [0002] The infrared focal plane detector is an important optoelectronic device to obtain the infrared thermal radiation information of the target scene. According to the working temperature of the detector, it can be divided into two major categories: the temperature of the sensitive element of the detector during operation is -100 ℃ and below. Refrigeration type, when the temperature of the sensitive element of the detector is near room temperature, it is the uncooled type. The principle of uncooled infrared focal plane detector is as follows figure 1 , is to convert the infrared radiation 1 of the scene invisible to the human eye, through the lens 2 to the infrared focal plane detector 3, and then convert it into electrical signals 30 of different sizes and transmit it to the...

AI Technical Summary

Problems solved by technology

[0006] At present, the resonant cavity structure of the photosensitive unit of the uncooled detector has a single function, and can only complete the absorption of infrared rays of a specific wavelength.

In the manufacturing process of pyroelectric uncooled infrared detectors, the conventional resonant cavity does not isolate the horizontal heat transfer of the photosensitive unit, resulting in the lateral thermal diffusion of the photosensitive unit, resulting in large noise and low resolution of the final converted electrical signal , cannot accurately reflect the infrared thermal radiation of the target scene

Moreover, the existing resonant cavity has slow heat dissipation and low response sensitivity, and cannot reflect the thermal radiation changes of the target scene in time

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