Method of cryogenic surface activation direct bonding for preparation of quartz glass capillary tube

A quartz glass, direct bonding technology, applied in the field of materials, can solve the problems of small effective observation range of the device and rough inner wall of the channel, and achieve the effect of improving device performance, smooth inner wall, and controllable size rules

Inactive Publication Date: 2015-11-04
HARBIN INST OF TECH SHENZHEN GRADUATE SCHOOL
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

In addition, the inner wall of the channel prepared by etching is gener

Method used

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  • Method of cryogenic surface activation direct bonding for preparation of quartz glass capillary tube
  • Method of cryogenic surface activation direct bonding for preparation of quartz glass capillary tube
  • Method of cryogenic surface activation direct bonding for preparation of quartz glass capillary tube

Examples

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Example Embodiment

[0034] Example 1:

[0035] A method for preparing a quartz glass capillary by low-temperature surface activation and direct bonding, mainly comprising the following steps:

[0036] (S1), clean all the glass sheets, and remove all kinds of organic pollution;

[0037] (S2), all glass sheets are treated in an oil bath with piranha lotion;

[0038] (S3), all glass sheets are cleaned by two-step RCA standard cleaning solution;

[0039] (S4), the glass sheet is immersed in an oil bath of activation solution;

[0040] (S5), after the glass sheet is rinsed with deionized water, it is transferred to a container filled with deionized water and bonded;

[0041] (S6), transfer the pre-bonded device to a stainless steel mold for pressure, keep it warm at a low temperature, and realize permanent bonding.

[0042] Among them, optical-grade quartz glass is preferably precision-processed into two sizes: 2.0mm×5.0mm×4.0mm and 0.2mm×2.0mm×5.0mm. The glass sheet is polished on 6 sides, the fla...

Example Embodiment

[0043] Embodiment 2: Preferable optical grade quartz glass is precision processed into two sizes: 10mm×10mm×2mm and 10mm×0.2mm×4.9mm. 10mm×10mm×2mm glass sheet is polished on both sides, 10mm×0.2mm×4.9mm is polished on 6 sides, the number of flatness apertures is N=1, and the surface roughness is required to be below 6nm. Two glass sheets of the above two different specifications are respectively taken. The glass slides were ultrasonically cleaned with methanol, acetone and deionized water for 5 minutes to remove various organic matter and dust pollution; then passed through piranha solution (H 2 SO 4 :H 2 o 2 Volume ratio=3:1) 120°C oil bath for 15 minutes. Then the glass piece is immersed in RCA1(NH 4 OH:H 2 o 2 :H 2 O volume ratio = 1:1:5) and RCA2 (NH 4 OH:HCl:H 2 (Volume ratio=1:1:5) were heated and boiled in an oil bath at 100°C for 15 minutes, followed by washing with deionized water for 5 minutes, and immersed in deionized water for later use. Then the glass...

Example Embodiment

[0044] Embodiment 3: Preferable optical grade quartz glass is precision processed into two sizes: 10mm×10mm×2mm and 10mm×0.3mm×4.85mm. 10mm×10mm×2mm glass sheet is polished on both sides, 10mm×0.3mm×4.85mm is polished on 6 sides, the number of flatness apertures is N=1, and the surface roughness is required to be below 6nm. The bonding conditions different from Example 2 are: the pre-bonding time at 100°C is 1.5 hours; steel needles with a diameter of 300 μm are used; pressure bonding is carried out in a vacuum oven at 150°C for 10 hours at low temperature. The rest of the steps are the same as in Example 2, and the peripheral dimensions of the finally prepared device are 10 mm×10 mm×4.3 mm, and the middle channel is a 300 μm square hole.

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Abstract

The present invention discloses a method of cryogenic surface activation direct bonding for preparation of a quartz glass capillary tube. According to the method, a wet chemical method is used to activate a quartz glass surface, and the manner of direct bonding of a stack of multiple layers of glass is applied, so as to prepare the quartz glass capillary tube at a lower temperature with a proper pressure. A steel needle of a specific size is added to a model and used to define a size and location of the capillary tube. The minimum diameter of the capillary tube prepared can reach as small as 200 micrometers ,and the bonding strength can reach 5 MPa. According to the method, the operation of cryogenic surface activation bonding is simple, the requirement on the glass sheet surface roughness is low, and no clean room or expensive ultra-high vacuum plasma treatment device is required. The method overcomes the problems of the pipe collapse, the device superficial devitrification and the inner wall roughness that may be caused by the conventionally prepared capillary tubes. The capillary tube produced has the smooth inner wall, increases the viewable region of the sample in the capillary tube, and dramatically improves chip performance.

Description

technical field [0001] The invention belongs to the technical field of materials, in particular to a method for preparing a quartz glass capillary by low-temperature surface activation and direct bonding. Background technique [0002] Quartz glass has excellent optical properties and good electroosmotic properties, and the use of quartz glass to prepare microfluidic chips, especially capillary chips, will greatly improve the detection efficiency of the chip. In the current microfluidic chip preparation technology, the traditional preparation method of quartz glass capillary mainly adopts the hot-melt drawing method. Four precision-processed glass ribbons are softened under a high-temperature flame lamp, and shaped by a specific mold to form a hollow capillary tube of quartz glass. However, the hollow pipes prepared by this method are generally large in size, and it is difficult to prepare micron-sized and sub-micron-sized pores, and the regular and flat shape cannot be comp...

Claims

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Application Information

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IPC IPC(8): C03C27/06C03C27/00
Inventor 李明雨麦成乐
Owner HARBIN INST OF TECH SHENZHEN GRADUATE SCHOOL
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