Probe sensing method and device based on light beam scanning confocal detection technology

Abstract

The invention relates to a probe sensing method and device based on the light beam scanning confocal detection technology, and belongs to the technical field of size measurement. A laser beam is input into a fiber probe at the inlet end of the fiber probe via a lens, the input beam is reflected by a fiber grating structure in the fiber probe and then output at the inlet end of the fiber probe, the output beam of the fiber probe is focused to photoelectric detectors via the output beam, so that the transverse photoelectric detector is used to detect the position of focused light spots and further to detect the transverse displacement of the probe, the axial photoelectric detector is used to detect the light intensity of the focused light spots and further to measure the axial displacement of the probe, and thus, 3D sensing is completed. The method and device are characterized in that the probe is convenient to prepare and easy to realize miniaturization, the detected light intensity is high, the light intensity is easy to detect, 3D detection and demodulation are realized, and the resolution is high.

Description

technical field [0001] The invention belongs to the technical field of size measurement, and mainly relates to a probe sensing method and device based on beam scanning confocal detection technology. Background technique [0002] In the field of cavity structure measurement with micro-size and large depth-to-diameter ratio, the use of optical fiber to make probes is an important solution, which has the advantages of easy miniaturization and easy fabrication. The existing probes are as follows: [0003] (1) The "dual optical fiber coupling contact micro-measurement force aiming sensor" described in the application number 200510072254.5. In this patent, a new structure sensor is proposed, which uses two optical fibers to burn coupling balls to realize the reverse direction of light transmission and detection of the outgoing light. [0004] Similar patents include: dual-fiber co-spherical coupling micro-measurement force aiming sensor with end-face microstructure (application n...

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Problems solved by technology

But the experiment was not successful, the sensing signal was completely submerged in the noise signal and could not be detected

[0012] The disadvantages of the existing probes described in the above-mentioned documents and the referenced documents mentioned above are: (1) the probes are difficult to manufacture and are not easy to miniaturize; (2) the intensity of the probe light is weak and difficult to detect; ( 3) No three-dimensional detection ability or weak three-dimensional detection ability; (4) low resolution

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