Micro-fluidic chip heat dissipation device, and manufacturing method thereof

Abstract

The invention discloses a micro-fluidic chip heat dissipation device, and a manufacturing method thereof. The micro-fluidic chip heat dissipation device is used for heat dissipation of heat production areas of micro-fluidic chips, and comprises high thermal conductivity micro-channels filled with a high thermal conductivity liquid; and the high thermal conductivity micro-channels and the heat production areas are arranged with microscale intervals. Heat dissipation of the micro-fluidic chips is realized via the high thermal conductivity micro-channels filled with the high thermal conductivity liquid, and the micro-fluidic chip heat dissipation device is especially suitable for enhanced heat transferring of tiny areas in low thermal-conductivity micro-fluidic chips. When the temperature of the heat production areas is increased, the high thermal conductivity liquid near the heat production areas absorbs heat energy of the heat production areas, and transfers the heat energy to larger spaces in the micro-fluidic chips rapidly, and heat generated in the micro-fluidic chips can be eliminated naturally under chip surface natural convection action. The micro-fluidic chip heat dissipation device is simple in structure, is convenient to prepare, is low in cost, and is excellent in integration performance, and more importantly, it is convenient to realize anisotropism reinforcement of heat transferring of the tiny areas in the chips.

Description

technical field [0001] The invention belongs to the field of microfluidic technology, and more specifically relates to a microfluidic chip cooling device and a manufacturing method thereof. Background technique [0002] In microfluidic chip analysis, micro components (micro pumps, micro valves, micro mixers, micro separators, micro reactors, etc.) Usually accompanied by heat generation. This heat has a heating effect on the sample reagent microfluidics, raising the temperature of the microfluidics. If the sample reagent temperature rises and deviates from the ideal biochemical temperature, the efficiency of microfluidic analysis will decrease, or even fail. For example, in a microfluidic cell culture chip driven by high-voltage electroosmosis, significant current Joule heat will be generated between the positive and negative microelectrodes of the electroosmotic micropump, making the actual culture temperature of the cell fluid higher than the ideal culture temperature. H...

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Problems solved by technology

This method is convenient, fast, and conducive to chip integration, but the chip substrate material doped with high thermal conductivity materials will also change in terms of conductivity, wetting, electroosmosis, electrowetting, water permeability and air permeability, etc., to a large extent. Limit the application range and effect of the original chip material

In addition, the enhancement of heat transfer in the microfluidic chip by increasing the thermal conductivity of the chip material is also an overall temperature control method. If there are multiple small areas in the chip that need to be controlled independently to enhance heat transfer, this method cannot be realized.

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