Disc type scanning electrode mask film microelectrolysis electrical discharge machining system and machining method

Abstract

The invention discloses a disc type scanning electrode mask film microelectrolysis electrical discharge machining system. The system comprises a workpiece, a disc type electrode and working fluid, the machining surface of the workpiece is covered with a mask film, machining windows are formed in the mask film, the workpiece is placed in the working fluid, the disc type electrode is located in the part, above the workpiece, of the working fluid, and the workpiece and the disc type electrode are connected with a power source through wires. The machining system and machining method have the advantages that the workpiece is covered with the structurally-insulating mask film, the mask film shape can be precisely copied, the large-scale textured microstructure machining is conducted, the machining is only conducted in areas which are uncovered by the mask film, and the high locality is achieved; the tool electrode which is used is a large-area electrode, and relative movement exists between the tool electrode and the workpiece; losses of all areas of the tool electrode can be made to tend to be balanced by planning a special movement curve, and all machining gaps are made to maintain unified; the electrolysis only serves for the polishing effect, and the main removal form is spark discharge removal; the working fluid is supplied in a mode from top to bottom and sprayed out of the center of the disc type electrode from inside to outside, so that the working fluid renewal is made to be more effective.

Description

technical field [0001] The invention relates to the technical field of electrical machining, in particular to a disk-shaped scanning electrode mask micro-electrolysis electrolytic machining system and a machining method. Background technique [0002] With the progress of microelectronics technology, nanotechnology, micro-nano processing technology, laser technology, microchemical technology, new materials and new processes, micro mechanical system (MEMS) technology has been continuously improved and developed. Microfluidic chips have great potential in the fields of biology, chemistry and medicine. Due to the advantages of low cost, good performance, and wide selection, polymer materials are easy to realize rapid, low-cost, and mass production of microfluidic chips through molds, and are increasingly becoming the main material for making microfluidic chips (see: Liu Ying. Research on injection molding technology of microstructure products based on microfluidic chips. Dalian...

AI Technical Summary

Problems solved by technology

The disadvantages of wet chemical etching are: the corrosive liquid has relatively high requirements on the corrosion resistance of machine tools and related parts. The processing process often produces chemical mist and toxic gases, which is not conducive to environmental protection. The side corrosion phenomenon on the principle of chemical etching will lead to processing The size is not easy to precisely control, the verticality of the side wall of the microchannel is not good, and the cross-sectional shape is difficult to control

The methods for processing surface microstructures by EDM technology include micro-EDM milling and EDM profiling. The EDM profiling method is similar to the present invention. Its shortcoming is: due to the serious loss of tool electrodes, it will affect the forming process. Accuracy and service life, and there is a heat-affected zone in processing, which causes a metamorphic layer on the surface of the workpiece, and the microstructure is prone to thermal deformation

Wet chemical etching also uses a photolithography mask, but the verticality of the sidewall of the etched microstructure is very poor, which cannot meet the verticality requirements of the microchannel

[0011] In addition, the existing electrolytic electrolytic machining still has defects such as small electrode area, unbalanced loss in each area of ​​the tool electrode, which is not conducive to the renewal of the working fluid, unstable machining gap, and poor machining surface quality.

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