Online laser measuring, machining and detecting method and device

A detection method and detection device technology, applied in the field of laser measurement, to achieve the effects of saving manpower and time, expanding the range of measurement and detection dimensions, and improving production efficiency

Active Publication Date: 2015-12-09
武汉飞能达激光技术有限公司
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0004] The invention provides a method and device for laser on-line measurement, processing and detection, aiming to solve

Method used

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  • Online laser measuring, machining and detecting method and device
  • Online laser measuring, machining and detecting method and device
  • Online laser measuring, machining and detecting method and device

Examples

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example 1

[0075] One method of the device of the present invention is used to grind the surface of the quartz ceramic device with the ultraviolet laser, and the flatness of the laser grinding surface is required to be ±0.01mm and the grinding roughness is less than 0.01mm. Before laser grinding and processing the surface of the quartz ceramic device, start the laser ranging system 4 earlier, send out the measuring laser beam 9 (the laser beam is a line beam), and move the Z-axis moving system so that the laser ranging system 4 is in contact with the quartz to be ground. The distance between the surfaces of the ceramic devices reaches within the range of measurement accuracy, and then the four-axis workbench 5 is started to carry out two-dimensional plane (workbench 5 carries out xy two-dimensional plane movement) to the surface geometry of the quartz ceramic device, and the line-by-line scanning measurement will obtain The plane three-dimensional data (x of each point, y and z coordinate...

example 2

[0077] The second method of the device of the present invention is used for fiber laser etching on the surface of a composite flexible curved aluminum film, requiring the laser to etch a circular array pattern with an inner diameter of 3mm and an outer diameter of 5mm on the aluminum film, and the accuracy of the etched rings The error is less than ±0.02mm, the center distance accuracy error between the rings is less than ±0.02mm, the thickness of the aluminum film is 0.04mm, the aluminum film of the laser etching part needs to be completely removed, but the damage to the carrier is less than 0.02mm. Before laser etching and processing the composite flexible curved surface aluminum film surface, start the laser distance measuring system 4 earlier, send out the measuring laser beam 9 (this laser beam is a point beam), move the Z axis in the motion system 13, make the laser distance measuring system 4 and When the distance between the surfaces of the composite flexible curved alu...

example 3

[0079]The third method of the device of the present invention is used for fiber laser to carry out laser etching processing on the surface of large-scale composite rigid curved copper film, requiring the laser to etch a circular array pattern with an inner width of 3mm and an outer width of 5mm on the copper film. The accuracy error of the array pattern is less than ±0.02mm, the accuracy error of the array center distance is less than ±0.02mm, the thickness of the through film is 0.012mm, the copper film of the laser etching part needs to be completely removed, but the damage to the carrier is less than 0.03mm. Before laser etching and processing the large-scale composite rigid curved copper film surface, start the laser distance measuring system 4 earlier, send out the measuring laser beam 9 (this laser beam is a line beam), and move the Z axis in the motion system 16 to make the laser distance measuring system 4 The distance between the surface of the composite flexible curve...

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Abstract

The invention discloses an online laser measuring, machining and detecting method and a device. By integrating laser measuring, machining and detecting, the geometric dimension and shape of the planar or curved surface of a work piece to be machined can be measured online before laser machining to obtain the actual planar or spatial structure dimension and feature, the error between the work piece to be machined and a theoretical mathematical model caused by deformation or time-dependent deformation produced in early-stage machining is eliminated, and the precision and quality of laser machining are improved. The device comprises a machining laser, an optical path system, and a laser machining head which are sequentially disposed on the same optical path. The device further comprises a laser ranging system, a computer control system, a mobile component, and a workbench. The laser ranging system is used to acquire measurement data of the work piece before and after machining, including the space coordinates and the normal angle of each point of the work piece, and offer the measurement data to the computer control system. By using the device, the precision and quality of 2D platform and 3D curved surface dimension measurement and detection can be improved, and the precision and quality of laser machining can be improved.

Description

technical field [0001] The invention belongs to the technical field of laser measurement, in particular to a method and device for laser on-line measurement, processing and detection. Background technique [0002] With the continuous improvement of dimensional accuracy, quality stability, repeatability and consistency of laser processing, the geometric dimensional accuracy and roughness quality before and after laser processing need to be strictly measured and tested. The current measurement and detection methods are to measure and detect the geometric dimension accuracy and quality of the processed object through contact electromechanical measurement or non-contact optical profiler in an off-line manner. This off-line measurement and detection method has the following problems: First, the amount of thermal deformation caused by the laser to the processed material before and after laser processing cannot be known, resulting in inevitable errors in the geometric dimension acc...

Claims

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Application Information

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IPC IPC(8): G01B11/00G01B11/26G01B11/22G01B11/02G01B11/30
Inventor 段军邓磊敏张菲曾晓雁
Owner 武汉飞能达激光技术有限公司
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