High-temperature vacuum sintering furnace capable of heating with graphite heating rods

Abstract

The invention relates to a high-temperature vacuum sintering furnace capable of heating with graphite heating rods, belonging to the technical field of high-temperature sintering furnaces. The high-temperature vacuum sintering furnace comprises a furnace shell, a furnace cylinder, a furnace cylinder inner sleeve, a furnace tube, a protective gas introduction mechanism and a furnace tube heating mechanism, wherein the furnace shell is provided with a furnace shell cooling mechanism; the furnace cylinder is arranged in the furnace shell cavity; the furnace cylinder inner sleeve contacts the furnace cylinder cavity wall; a furnace bed is arranged in the furnace tube cavity; the protective gas introduction mechanism is connected with a protective gas supply source through a pipeline; the furnace tube heating mechanism is arranged in the furnace tube heating mechanism cavity; an electrode interface is positioned on the middle part of the furnace shell; the furnace cylinder is provided with a graphite electrode column hole; a feed mechanism is connected with the electrode interface; the furnace tube heating mechanism comprises a set of graphite heating units and a graphite electrode column; each graphite heating unit is composed of a set of graphite heating rods and a pair of graphite conductive connection strap; one graphite conductive connection strap is connected with one end of one set of graphite heating rods; and the other graphite conductive connection strap is connected with the other end of one set of graphite heating rods. The diameter of the furnace tube cavity is reduced; the high-temperature vacuum sintering furnace can not be influenced by the interference of the furnace tube heating mechanism; the service life is prolonged; and the vacuumizing time is shortened.

Description

technical field [0001] The invention belongs to the technical field of high-temperature sintering furnaces, and in particular relates to a high-temperature vacuum sintering furnace heated by graphite heating rods. Background technique [0002] The high-temperature vacuum sintering furnace mentioned above was born under the background of "the tool must be sharpened first if you want to do it well". Taking the aluminum nitride (ALN) substrate belonging to the category of diamond-like nitride as an example, because it has not Limited to the advantages of the following aspects: high thermal conductivity, about 20W / m·k, close to BeO and SiC, and Al 2 o 3 More than five times; the coefficient of thermal expansion is small, at 4.5×10 -6 ℃, with Si (3.5~4×10 -6 °C) and GaAs (6×10 -6 ℃) are comparable; the electrical properties are excellent, specifically, the dielectric constant, dielectric loss, volume resistivity and dielectric strength are excellent; the mechanical properties...

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Problems solved by technology

The advantage of placing the heating element, that is, the heating element in the furnace, can directly heat the products in the furnace, but there are at least the following technical problems in the actual use process: First, due to the relatively limited space of the furnace, placing the heating element in its The interior will inevitably occupy the limited space of the furnace, so the space of the furnace can only be enlarged correspondingly to accommodate the heating elements, but the increase in the space of the furnace not only increases the difficulty of making the furnace body, but also is not conducive to saving materials; The heating element, that is, the aforementioned heating element, is set in the furnace. Therefore, once the product to be sintered at high temperature is loaded into the furnace, such as the aforementioned aluminum nitride, and the product after sintering is taken out of the furnace, it is very easy to Hitting or rubbing the heating element can lead to damage to the heating element in severe cases, and the damage to the heating element is a taboo for manufacturers using high-temperature vacuum sintering furnaces, because on the one hand, maintenance is troublesome and time-consuming, and on the other hand, it affects the quality of the furnace. sintering efficiency; third, because the heating element is placed in the furnace, it is easily polluted by the atmosphere in the furnace and directly affects its service life; fourth, because the heating element is installed in the furnace, the volume of the furnace increases, so not only vacuum The time is extended, and the amount of protective gas is also increased accordingly

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