Novel silicon-ytterbium quantum surface plasma light source and preparation method thereof
A plasma and quantum surface technology, applied in the field of plasma light source and its preparation, achieves the effect of low cost, easy implementation and simple structure
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[0023] Embodiment 1 of the present invention: a novel silicon ytterbium quantum surface plasma light source is shown in the figure. In the figure, the slanted downward arrow represents the pump light, and the vertical arrow represents the plasma light emission, including the silicon substrate 1. The upper surface of the silicon substrate 1 is provided with a Purcell cavity array structure distributed at intervals, and a group of silicon ytterbium quantum planes composed of a silicon oxide film 2 and an ytterbium film 3 is provided in each Purcell cavity array structure. In the Purcell cavity array structure, the diameter of the Purcell cavity is 10 μm, and the period interval is 50 μm; the thickness of the silicon oxide film 2 is 6 nm, and the thickness of the ytterbium film 3 is 15 nm.
[0024] The preparation method of novel silicon ytterbium quantum surface plasma light source comprises the following steps
[0025] 1) Pretreatment: P-type doping is performed on the single c...
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