A Surface Plasmon Resonance High Refractive Index Sensor Based on Porous Aluminum Film Structure and Its Application

A surface plasmon, high refractive index technology, applied in the field of sensors, can solve the problems of small contrast, low excitation efficiency, poor stability, etc., and achieve the effect of high productivity, low cost, and effective detection

Inactive Publication Date: 2018-08-03
SUZHOU RES INST SHANDONG UNIV
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  • Summary
  • Abstract
  • Description
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Problems solved by technology

[0003] 1) Most of the surface plasmon resonance high-refractive index sensors reported at home and abroad are based on metal coating structures, which have problems such as poor stability, low excitation efficiency, and low contrast;
[0004] 2) There are many surface plasmon resonance high-refractive index sensors that detect the refractive index in the ordinary range, but the sensors used in the environment of higher refractive index are rarely reported

Method used

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  • A Surface Plasmon Resonance High Refractive Index Sensor Based on Porous Aluminum Film Structure and Its Application
  • A Surface Plasmon Resonance High Refractive Index Sensor Based on Porous Aluminum Film Structure and Its Application
  • A Surface Plasmon Resonance High Refractive Index Sensor Based on Porous Aluminum Film Structure and Its Application

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Embodiment 1

[0036] Such as figure 1 shown.

[0037] A surface plasmon resonance high-refractive index sensor based on a porous aluminum film structure comprises a quartz waveguide, a porous metal aluminum film layer arranged on the upper surface of the quartz waveguide, an incident light source and a detector.

[0038] The thickness of the porous metal aluminum film layer is 10-100nm.

[0039] The thickness of the quartz waveguide is 1-10mm.

[0040] The incident light source is an LED light source with an incident wavelength of 400-750nm.

[0041] Holes with a diameter of 100-200nm are arranged on the porous metal aluminum film layer, and the arrangement period of the holes is 200nm-400nm.

Embodiment 2

[0043] The preparation method of porous metal aluminum film layer as described in embodiment 1 comprises:

[0044] First, spin-coat photoresist on the upper surface of the quartz waveguide;

[0045] Secondly, the two-dimensional periodic hole pattern is directly written on the photoresist by electron beam lithography;

[0046] Then, use a coating machine to coat a layer of metal aluminum film;

[0047] Finally, the photoresist and the circular metal aluminum film layer attached to the photoresist are removed to obtain a porous metal aluminum film layer.

Embodiment 3

[0049] A sensing method utilizing a sensor as described in embodiment 1, comprising steps as follows:

[0050] 1) The incident light source is coupled into the quartz waveguide, and due to the total reflection effect, the incident light is transmitted under the constraint of the quartz waveguide;

[0051] 2) After the incident light reaches the porous metal aluminum film layer, the incident light is coupled out through the quartz waveguide, and forms a plasmon resonance effect on the surface of the porous metal aluminum film layer;

[0052] 3) Due to the limitation of matching conditions: under different wavelengths of incident light, the coupling efficiency of light is different; the coupling efficiency reaches the maximum at a specific wavelength of light, forming a spectral resonance absorption peak; The increase of the ambient refractive index moves to the long-wave direction, so as to realize the measurement of the refractive index of the environment where the sensor is l...

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Abstract

A surface plasmon resonance high-refractive index sensor based on a porous aluminum film structure comprises a quartz waveguide, a porous metal aluminum film layer arranged on the upper surface of the quartz waveguide, an incident light source and a detector. The invention adopts a porous metal layer structure as a sensing structure, which significantly enhances the surface plasmon resonance intensity and greatly improves the sensitivity of the sensor. The porous structure of the present invention forms a micro-nano sensing structure, which can be simultaneously applied to surface plasmon resonance biosensors for monitoring high refractive index and low refractive index.

Description

technical field [0001] The invention relates to a surface plasmon resonance high-refractive index sensor based on a porous aluminum film structure and an application thereof, belonging to the technical field of sensors. Background technique [0002] Due to the unique optical properties of Surface Plasmon Polariton (SPP), it has important application prospects in single-molecule detection, new display, solar cells, and negative refraction materials, and has become the focus of current research scholars. One of the hot spots. Among them, surface plasmon resonance (SPR) technology has been widely used in biosensors due to its advantages of label-free, high sensitivity, high specificity, real-time and fast. However, the current research on optical fiber at home and abroad mainly has the following problems: [0003] 1) Most of the surface plasmon resonance high-refractive index sensors reported at home and abroad are based on metal coating structures, which have problems such a...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G01N21/41G01N21/552
Inventor 刘冠秀倪桂全牛传宁冯德军
Owner SUZHOU RES INST SHANDONG UNIV
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