Transmission/scanning electron microscope mechanical-thermal coupling field loaded in-situ experimental platform

Abstract

Belonging to the field of material microstructure-mechanical property in situ characterization, the invention provides a transmission / scanning electron microscope mechanical-thermal coupling field loaded in-situ experimental platform. The platform is mainly composed of a heating and sample carrying zone, drive beams, heat sink beams, mass blocks and a substrate. The platform drive part is a V shaped electrothermal drive beam, the stepping precision can reach nanometer scale, and the deformation mode can realize uniaxial tension. The platform has a small overall size, can be placed in a small and narrow space at the front end of a multi-electrode TEM biaxial tilting sample rod, and can cooperate with the sample rod to perform biaxial tilting observation. The platform also can be used cooperatively with a scanning electron microscope and scanning electron microscope assembled accessories like various energy spectrums and microstructures (EBSD). When a material is heated and deforms, the deformation process of the material under a condition ranging from room temperature to high temperature (600DEG C) can be observed in situ at sub-angstrom, atom and nano scale to study the deformation mechanism and reveal the relationship between the microstructure and mechanical properties.

Description

Technical field: [0001] The invention relates to an integrated experimental platform that loads temperature and stress coupling fields in a transmission / scanning electron microscope in real time, and can realize in-situ observation. Through this platform and combined with transmission / scanning electron microscope, it is possible to study the microstructure evolution process of micro- and nano-scale samples under high temperature and stress conditions, and provide strain information of the samples. The invention belongs to the field of high-temperature mechanical properties of micro and nano materials in transmission / scanning electron microscope-microstructure in-situ characterization. Background technique: [0002] With the development of modern technology, more and more micro-nano materials are used in micro-nano devices, such as micro-electromechanical systems (MEMS) and nano-electromechanical systems (NEMS). The stability of these materials under high temperature and stress co...

AI Technical Summary

Problems solved by technology

The high-temperature stretching device placed in the SEM mentioned in "In-situfatigueinanenvironmentalscanningelectronmicroscope-Potentialandcurrentlimitations" published by G.Biallas and H.J.Maier can exert a large driving force and load a high temperature of 750°C at the same time, but the sample scale is at the millimeter level, which is very small. It is difficult to achieve precise control of the deformation of micro-nano materials

Gatan Corporation of the United States and Denssolution of the Netherlands use two methods to realize the in-situ heating operation in the transmission electron microscope, which can observe the evolution information of the structure of the material at different temperatures, but cannot simultaneously apply a stress field to the material

The method mentioned in the article "Superplasticcarbonnanotubes" published by J.Y.Huang et al. can realize the high-temperature deformation of carbon nanotubes, but because the more complex connection and unloading structure is placed in the sample chamber of the transmission electron microscope, the sample stage can only be tilted at a small angle (± 5°C) or can only tilt uniaxially (no more than ±20°C), it is difficult to observe crystal samples from the sub-Angstrom and atomic scale under the low-index positive band axis, which limits its application range

Han Xiaodong et al. designed a tensile tester that can apply stress to materials in a specific temperature range in the transmission electron microscope in the patent "An in-situ TEM stretching platform for studying the mechanical properties of materials at a specific temperature" (patent application number: 201220320134.8). Stretch stage, simple in design, low in cost, can satisfy large-angle tilting, but the heating temperature is lower than 300°C, and the driving displacement of the sample cannot be precisely controlled

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