Transmission/scanning electron microscope mechanical-thermal coupling field loaded in-situ experimental platform

Abstract

Belonging to the field of material microstructure-mechanical property in situ characterization, the invention provides a transmission/scanning electron microscope mechanical-thermal coupling field loaded in-situ experimental platform. The platform is mainly composed of a heating and sample carrying zone, drive beams, heat sink beams, mass blocks and a substrate. The platform drive part is a V shaped electrothermal drive beam, the stepping precision can reach nanometer scale, and the deformation mode can realize uniaxial tension. The platform has a small overall size, can be placed in a small and narrow space at the front end of a multi-electrode TEM biaxial tilting sample rod, and can cooperate with the sample rod to perform biaxial tilting observation. The platform also can be used cooperatively with a scanning electron microscope and scanning electron microscope assembled accessories like various energy spectrums and microstructures (EBSD). When a material is heated and deforms, the deformation process of the material under a condition ranging from room temperature to high temperature (600DEG C) can be observed in situ at sub-angstrom, atom and nano scale to study the deformation mechanism and reveal the relationship between the microstructure and mechanical properties.

Description

Technical field: [0001] The invention relates to an integrated experimental platform that loads temperature and stress coupling fields in a transmission / scanning electron microscope in real time, and can realize in-situ observation. Through this platform and combined with transmission / scanning electron microscope, it is possible to study the microstructure evolution process of micro- and nano-scale samples under high temperature and stress conditions, and provide strain information of the samples. The invention belongs to the field of high-temperature mechanical properties of micro and nano materials in transmission / scanning electron microscope-microstructure in-situ characterization. Background technique: [0002] With the development of modern technology, more and more micro-nano materials are used in micro-nano devices, such as micro-electromechanical systems (MEMS) and nano-electromechanical systems (NEMS). The stability of these materials under high temperature and stress co...

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Problems solved by technology

The high-temperature stretching device placed in the SEM mentioned in "In-situfatigueinanenvironmentalscanningelectronmicroscope-Potentialandcurrentlimitations" published by G.Biallas and H.J.Maier can exert a large driving force and load a high temperature of 750°C at the same time, but the sample scale is at the millimeter level, which is very small. It is difficult to achieve precise control of the deformation of micro-nano materials

Gatan Corporation of the United States and Denssolution of the Netherlands use two methods to realize the in-situ heating operation in the transmission electron microscope, which can observe the evolution information of the structure of the material at different temperatures, but cannot simultaneously apply a stress field to the material

The method mentioned in the article "Superplasticcarbonnanotubes" published by J.Y.Huang et al. can realize the high-temperature deformation of carbon nano...

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