Making method for molybdenum oxide nano-fiber paper hydrogen sensor

A technology of nanofiber and molybdenum oxide, applied in the direction of material resistance, etc., to achieve high specific surface area, good recovery performance, and good repeatability

Inactive Publication Date: 2016-02-17
HUBEI UNIV
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

A concept and practice of sputtering metal Pt / Pd nanoparticle arrays on one side of molybdenum oxide nanofiber paper to form electrodes to make hydrogen actuators, which has not been seen in published documents or patented technologies

Method used

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  • Making method for molybdenum oxide nano-fiber paper hydrogen sensor
  • Making method for molybdenum oxide nano-fiber paper hydrogen sensor
  • Making method for molybdenum oxide nano-fiber paper hydrogen sensor

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preparation example Construction

[0027] A method for preparing a molybdenum oxide nanofiber paper hydrogen sensor of the present invention is to sputter a metal Pt / Pd nanoparticle array on a molybdenum oxide nanofiber paper covered with a metal mask to form a conductive electrode method; the preparation method includes the following steps: step:

[0028] (1) Take the molybdenum oxide nanofiber paper of the set size;

[0029] (2) Select a sputtering metal mask with a set size, and there are 12 pairs of interdigitated electrodes on the metal mask, and cover the metal mask on the molybdenum oxide nanofiber paper to form a substrate;

[0030] (3) metal Pt / Pd nanoparticle arrays are sputtered on the substrate to make a hydrogen sensor with conductive electrodes:

[0031] (4) After the sputtering is completed, the metal mask is removed, and the molybdenum oxide nanofiber paper after the sputtered Pt / Pd nanoparticle array is cut from the middle along the length direction to become two hydrogen sensitive elements wi...

Embodiment 1

[0035] 1. Select molybdenum oxide nanofiber paper with a size of 30mm×20mm.

[0036] 2. Select a metal mask with the same size as the molybdenum oxide nanofiber paper (such as figure 2 As shown), the metal mask plate has 4 large electrodes and 12 pairs of small electrodes. Adopting this structure is beneficial to subsequent testing and packaging.

[0037] 3. Cleaning of the mask: The selected metal mask is ultrasonically cleaned for 30 minutes with analytical acetone, pure ethanol and deionized water, and then baked in air at a temperature of 60°C for 20 minutes to obtain a clean and dry mask. Metal mask.

[0038] In this embodiment, the ultrasonic cleaner is a commercially available numerically controlled ultrasonic cleaner with a cleaning power of 40-100W.

[0039] 4. Using standard DC magnetron sputtering technology to prepare oxide film nanofiber paper hydrogen sensor, the steps are as follows:

[0040] (1) Place the sample: First, open the magnetron sputtering equipme...

Embodiment 2

[0048] 1. Select molybdenum oxide nanofiber paper with a size of 30mm×20mm.

[0049] 2. Select a metal mask with the same size as the molybdenum oxide nanofiber paper (such as figure 2 As shown), the metal mask plate has 4 large electrodes and 12 pairs of small electrodes. Adopting this structure is beneficial to subsequent testing and packaging.

[0050] 3. Cleaning of the mask: The selected metal mask is ultrasonically cleaned for 30 minutes with analytical acetone, pure ethanol and deionized water, and then baked in air at a temperature of 60°C for 20 minutes to obtain a clean and dry mask. Metal mask.

[0051] In this embodiment, the ultrasonic cleaner is a commercially available numerically controlled ultrasonic cleaner with a cleaning power of 40-100W.

[0052] 4. Using standard DC magnetron sputtering technology to prepare oxide film nanofiber paper hydrogen sensor, the steps are as follows:

[0053] (1) Place the sample: First, open the magnetron sputtering equipme...

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Abstract

The invention discloses a making method for a molybdenum oxide nano-fiber paper hydrogen sensor. According to the making method, a metal Pt / Pd nano-particle array is sputtered on one side face of molybdenum oxide nano-fiber paper prepared on the basis of the patent of molybdenum oxide nano-fiber paper and a making method thereof (201510308204.6). The making method comprises the steps that the molybdenum oxide nano-fiber paper is coated with a metal mask plate, the Pt / Pd nano-particle array is sputtered in magnetic control vacuum sputtering equipment to form an electrode, the nano-fiber paper subjected to sputtering is cut from the middle to form two hydrogen-sensitive elements identical in performance, and the hydrogen-sensitive elements are encapsulated into an IC base to form the finished hydrogen sensor. Sensors different in response time and recovery time can be prepared according to different nano-particles, sputtering time and sputtering power. The sensor making process is simple and low in energy consumption and cost; work can be done at a normal temperature, response time and recovery time are short, sensitivity is high, stability is good, service life is long, repeatable utilization can be achieved, and the hydrogen-sensitive elements can be conveniently integrated in various multi-path sensors.

Description

technical field [0001] The invention relates to a method for preparing a molybdenum oxide nanofiber paper hydrogen sensor, and belongs to the technical field of inorganic nano functional material hydrogen sensors. Background technique [0002] Hydrogen can be produced by hydrolysis and other methods, which is a secondary energy source. Hydrogen has good combustion performance, high calorific value, only produces water after combustion, and can be recycled, clean and pollution-free. It is widely used in many fields such as industry and agriculture. It is an ideal new energy source in the future. However, hydrogen is flammable and explosive, and sensors with high sensitivity, fast response, good repeatability, and wide temperature application range are required to monitor hydrogen. Commonly used hydrogen sensors include: semiconductor type, electrochemical type, optical type and thermoelectric type. Obtain measurement data. Thermoelectric hydrogen sensor materials can be ro...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01N27/12
Inventor 胡永明罗显涛游开开王钊顾豪爽
Owner HUBEI UNIV
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