A temperature/refractive index dual-parameter sensor based on cascaded coupled microcavities
A coupling microcavity and cascade coupling technology, applied in the direction of instruments, measuring devices, etc., can solve the problems of practical application inconvenience, cross sensitivity, etc., and achieve the effect of simple manufacturing method, high integration and compact structure
Active Publication Date: 2017-11-10
ZHEJIANG UNIV
View PDF6 Cites 0 Cited by
- Summary
- Abstract
- Description
- Claims
- Application Information
AI Technical Summary
Problems solved by technology
Therefore, in order to avoid the cross-sensitivity problem of refractive index and temperature, when using integrated planar optical waveguide sensors for high-precision measurement, it is often necessary to perform additional compensation for the influence of temperature, which brings great difficulties to the practical application of integrated planar optical waveguide sensors. great inconvenience
Method used
the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
View moreImage
Smart Image Click on the blue labels to locate them in the text.
Smart ImageViewing Examples
Examples
Experimental program
Comparison scheme
Effect test
Embodiment 1
[0056] In this embodiment, the bus waveguide is an SOI integrated planar optical waveguide with a height of 220 nm, and both the first coupling microcavity and the second coupling microcavity are SOI one-dimensional photonic crystal nanobeam cavities with a height of 220 nm. The specific structure of the first coupling microcavity is shown in Fig. 2(a), the connecting waveguide width W wave1 330nm, coupling interval g 1 The width of the microcavity is 600nm, and the width of the microcavity gradually decreases from the middle to the left and right ends according to the square of the distance from the center, and the width of the central microcavity is W center 700nm, edge microcavity width W end is 500nm, the one-dimensional periodic hole center distance is the one-dimensional periodic constant a 1 420nm, the radius of the circular holes is 125nm, the total number of circular holes is 37, and the etching depth of the circular holes is 220nm. The specific structure of the se...
the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to View More PUM
Login to View More Abstract
The invention discloses a temperature / refractive index two-parameter sensor based on cascading coupled micro-cavities. The two-parameter sensor comprises a broadband light source, a bus waveguide, a first coupled micro-cavity, a second coupled micro-cavity and an optical detector. The broadband light source, the bus waveguide, the first coupled micro-cavity, the second coupled micro-cavity and the optical detector are in coupling connection from the left to right in sequence; and the first coupled micro-cavity and the second coupled micro-cavity are arranged at the same side of the bus waveguide, and are coupled to the bus waveguide through an evanescent field effect. The first coupled micro-cavity and the second coupled micro-cavity have different resonant wavelengths and different optical field energy distribution proportions; the first coupled micro-cavity has relatively higher refractive index response sensitivity, while the second coupled micro-cavity has relatively higher temperature response sensitivity; and by utilizing the significant difference of the two micro-cavities on the aspects of refractive index response sensitivity and temperature response sensitivity, refractive index and temperature information can be obtained simultaneously in one measurement process.
Description
technical field [0001] The invention belongs to the field of optoelectronic devices, in particular to a temperature / refractive index dual-parameter sensor based on cascaded coupled microcavities. Background technique [0002] Refractive index and temperature are two very important parameters in the fields of physics, chemistry, biology and other disciplines. The refractive index of the liquid has a direct and close relationship with the material composition and composition concentration of the liquid. It has become a common analytical measurement method to infer the component concentration by measuring the refractive index of the liquid sample; temperature is a reflection of the activity of biological substances and the biochemical reaction rate. , an important indicator of the process. Therefore, the precise measurement of the refractive index and temperature is of great significance in the fields of chemical production, food testing, biomedicine, and environmental monitor...
Claims
the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to View More Application Information
Patent Timeline
Login to View More Patent Type & Authority Patents(China)
IPC IPC(8): G01D21/02
CPCG01D21/02
Inventor 时尧成刘鹏浩
Owner ZHEJIANG UNIV