Replacement chamber sealing apparatus for electronic material firing furnace
A technology of electronic materials and sealing devices, which is applied in the field of replacement chamber sealing devices, can solve the problems of reduced sealing effect, failure to reach, and no technical inspirations, etc., and achieve the effect of improving firing quality and ensuring protective gas
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[0022] In order to enable the public to understand the technical essence and beneficial effects of the present invention more clearly, the applicant will describe in detail in the form of examples below, but the description of the examples is not a limitation to the solution of the present invention. All equivalent transformations that are merely formal rather than substantive should be regarded as the technical solution scope of the present invention.
[0023] In the following description, all concepts related to the directionality of up, down, left, right, front and back, or orientation, unless otherwise specified figure 1 In terms of the position and state, it cannot be understood as a special limitation on the technical solution provided by the present invention.
[0024] See figure 1 , Shows a furnace body 1, an inlet gas chamber box body 2, a left displacement chamber 3 and a right displacement chamber 4 belonging to the structural system of the electronic material firing furn...
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