Assembled hemisphere resonance micro gyroscope and processing process thereof

Abstract

The invention discloses an assembled hemisphere resonance micro gyroscope, and belongs to the field of micro electronmechanical and inertia navigation. An upper layer glass substrate, a peripheral anchor point structure and a lower layer glass substrate are sequentially arranged from top to bottom; a round groove is formed in the center of the bottom surface of the upper layer glass substrate; the peripheral anchor point structure is of a hollow frame type structure; the round groove and a hollow region of the peripheral anchor point structure are communicated to form a cavity; a hemisphere casing harmonic oscillator is arranged in the center of the cavity; sixteen electrodes are arranged on the upper layer glass substrate at equal intervals; each electrode is connected with corresponding sixteen electrode holes; the electrode holes are formed in the upper layer glass substrate. The invention also discloses a processing process of the assembled hemisphere resonance micro gyroscope. The assembled hemisphere resonance micro gyroscope has the advantages that the encapsulation is realized; the production period is shortened; the production efficiency is improved. The processing process of the hemisphere casing harmonic oscillator and the uniform distribution type electrodes is simple; the dimension is small; the production cost is low; the production process is suitable for mass production.

Description

Technical field [0001] The invention belongs to the field of micro-electromechanical and inertial navigation, and specifically relates to an assembled hemispherical resonance micro-gyro and its processing technology. Background technique [0002] As an inertial attitude measurement device, the hemispherical resonant gyroscope has high measurement accuracy, super stability and reliability, good resistance to shock, vibration and temperature characteristics, unique shutdown and radiation resistance, and long life. , Short start-up time and other outstanding advantages, it is considered by the inertial technology community as the most ideal component in the advanced strapdown inertial navigation system in the 21st century. [0003] In 2014, P. Shao and others of Georgia Institute of Technology in the United States introduced in their latest paper a hemispherical shell of self-calibrating large capacitance electrodes made by 3D-HARPSS process. The diameter of the hemispherical shell is...

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Problems solved by technology

[0004] The forming of the hemispherical resonator has been the bottleneck restricting its development so far. According to the information, so far, only the United States and Russia have produced relatively good finished products, and other countries are only in the research stage or the products produced have low performance.

Moreover, the process of making the hemispherical shell resonant gyroscope using the 3D-HARPSS process is complicated, and the supporting area of ​​the hemispherical shell is made of sacrificial layer SiO 2 Therefore, when using the HF supercritical drying method to etch the sacrificial layer to release the hemispherical shell, the concentration of HF and the etching time are very critical, and it is difficult to control, which may cause the support area to be too large or too small, seriously affecting The performance of the gyroscope

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