Assembled hemisphere resonance micro gyroscope and processing process thereof
A hemispherical resonance, micro-gyroscope technology, applied in the field of micro-electromechanical and inertial navigation, can solve the problems of complex process of the hemispherical shell resonant gyroscope, affecting the working performance of the gyroscope, large supporting area, etc., and achieves low production cost, small size, The effect of simple processing technology
Active Publication Date: 2016-06-01
SOUTHEAST UNIV
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The invention discloses an assembled hemisphere resonance micro gyroscope, and belongs to the field of micro electronmechanical and inertia navigation. An upper layer glass substrate, a peripheral anchor point structure and a lower layer glass substrate are sequentially arranged from top to bottom; a round groove is formed in the center of the bottom surface of the upper layer glass substrate; the peripheral anchor point structure is of a hollow frame type structure; the round groove and a hollow region of the peripheral anchor point structure are communicated to form a cavity; a hemisphere casing harmonic oscillator is arranged in the center of the cavity; sixteen electrodes are arranged on the upper layer glass substrate at equal intervals; each electrode is connected with corresponding sixteen electrode holes; the electrode holes are formed in the upper layer glass substrate. The invention also discloses a processing process of the assembled hemisphere resonance micro gyroscope. The assembled hemisphere resonance micro gyroscope has the advantages that the encapsulation is realized; the production period is shortened; the production efficiency is improved. The processing process of the hemisphere casing harmonic oscillator and the uniform distribution type electrodes is simple; the dimension is small; the production cost is low; the production process is suitable for mass production.
Application Domain
Speed measurement using gyroscopic effectsGyroscopes/turn-sensitive devices
Technology Topic
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Examples
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Property | Measurement | Unit |
Diameter | 1200.0 ~ 1500.0 | µm |
Thickness | 1.0 ~ 5.0 | µm |
tensile | MPa | |
Particle size | Pa | |
strength | 10 |
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