Non-covalently modified graphene field effect transistor-based tumor marker detection sensor and production method thereof
A non-covalent modification and tumor marker technology, which is applied in the field of tumor marker detection sensors and its preparation, can solve the problems of complex detection and analysis process and time-consuming, etc., and achieve the advantages of easy manufacturing process, strong versatility, and excellent electrical performance Effect
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[0037] Such as figure 2 Shown is a schematic diagram of a real-time detection system of a tumor marker detection sensor based on a non-covalently modified graphene field effect tube. The process flow of the non-covalently modified graphene field effect tube is to thermally oxidize a layer of 300nm silicon dioxide 2 on a silicon substrate 1, and make it on the surface of the silicon dioxide through a lift-off process and an electron beam evaporation process The metal electrodes composed of 10nm titanium and 30nm gold are used as the drain terminal 3 and source terminal 4 of the graphene field effect tube. The graphene film is transferred to the surface of the metal electrode by a wet transfer method, and the graphene is transferred with acetone. The PMMA glue on the surface is dissolved, leaving graphene on the surface of the metal electrode, and then forming a graphene channel 7 (length 60μm, width 30μm) by photolithography and plasma etching, which is deposited on the gold ele...
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