Method for producing hydrogen gas detection sensor and resulting sensor
A technology for detecting sensors and producing hydrogen, which is applied to the structural details of gas analyzers, the existence of test gases, instruments, etc., to achieve the effects of increased sensitivity and high specific surface area
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[0060] For a better understanding of the present invention, the following describes the preparation of aerochromic H 2 A preferred embodiment of the method described in the sensor.
[0061] Phase 1: First, WO on a quartz substrate (1) 3 layer deposition. The deposition was carried out using magnetron sputtering with a deposition angle (θ) of 80° to measure the direction from perpendicular to the substrate to perpendicular to the magnetron target (see figure 1 ). The magnetron sputtering method conditions used are:
[0062] 10 -6 mbar residual pressure
[0063] 5·10 -3 working pressure in millibars
[0064] 20sccm Ar (inert gas) + 5sccm O 2 (reactive gas) gas mixture
[0065] Source power: 125w
[0066] Tungsten target or cathode (2).
[0067] Alternative deposition of mixed oxides: by oxide WO 3 and SiO 2 A mixture composed of SixWyOx. The magnetron sputtering technique will also be performed for a deposition angle of 80° under the following conditions:
[0068]...
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