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Method for producing hydrogen gas detection sensor and resulting sensor

A technology for detecting sensors and producing hydrogen, which is applied to the structural details of gas analyzers, the existence of test gases, instruments, etc., to achieve the effects of increased sensitivity and high specific surface area

Inactive Publication Date: 2019-09-10
ABENGOA SOLAR NEW TECH SA
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

These conditions force current state-of-the-art devices to use oxides in powder form, which involves various difficulties in their handling and fixation on substrates, and also prevents the use of optical detection methods that require non-photodispersible materials

Method used

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  • Method for producing hydrogen gas detection sensor and resulting sensor
  • Method for producing hydrogen gas detection sensor and resulting sensor
  • Method for producing hydrogen gas detection sensor and resulting sensor

Examples

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Embodiment Construction

[0060] For a better understanding of the present invention, the following describes the preparation of aerochromic H 2 A preferred embodiment of the method described in the sensor.

[0061] Phase 1: First, WO on a quartz substrate (1) 3 layer deposition. The deposition was carried out using magnetron sputtering with a deposition angle (θ) of 80° to measure the direction from perpendicular to the substrate to perpendicular to the magnetron target (see figure 1 ). The magnetron sputtering method conditions used are:

[0062] 10 -6 mbar residual pressure

[0063] 5·10 -3 working pressure in millibars

[0064] 20sccm Ar (inert gas) + 5sccm O 2 (reactive gas) gas mixture

[0065] Source power: 125w

[0066] Tungsten target or cathode (2).

[0067] Alternative deposition of mixed oxides: by oxide WO 3 and SiO 2 A mixture composed of SixWyOx. The magnetron sputtering technique will also be performed for a deposition angle of 80° under the following conditions:

[0068]...

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Abstract

The present invention relates to a method of producing a visual hydrogen sensor and a sensor produced in this way, which sensor allows the presence of hydrogen in a medium to be detected by the naked eye due to a color change in said sensor. The method involves depositing a thin, porous layer of oxide that does not absorb visible light in a fully oxidized state that becomes colored when partially reduced. This deposition was performed using vapor deposition (PVD) in a glancing angle configuration (GLAD). The method also involves preparing an active metal precursor solution capable of dissociating hydrogen molecules and supports and depositing this solution on the oxide layer to incorporate a minimal amount of active metal in the form of nanoparticles within the pores of the oxide layer.

Description

technical field [0001] The invention relates to a method for producing a hydrogen detection sensor, plus a sensor produced by the method. [0002] The main application of the invention is in the field of thermoelectric solar power generation, for the detection of hydrogen gas that may be produced due to the decomposition of heat-carrying fluids used in this industry. The developed sensor is also recommended for applications requiring the detection of trace amounts of hydrogen in a variety of industrial settings. Background technique [0003] Although in scientific and patent bibliographies, a large number of hydrogen detection methods have been reported, which are based on measurements such as ZnO, SnO 2 、TiO 2 The process of conductivity change in oxide semiconductors, etc., is generally activated by the presence of metal particles (such as Pt, Pd, etc.) that can dissociate molecular hydrogen, and its important disadvantage is that it must be operated at high temperatures...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G01N21/78G01N33/22C23C14/10C23C14/35
CPCG01N33/005G01N21/783C23C14/083C23C14/226G01N31/224C23C14/35C23C14/5806
Inventor 吉列尔莫·埃斯皮诺萨鲁达诺拉·马汀兹桑斯阿古斯丁·罗德里格斯冈萨雷斯艾力皮佩德罗·卡斯蒂列罗杜兰安赫尔·巴兰科科洛弗朗西斯科·于贝洛瓦林西亚胡安佩德罗·埃斯皮诺斯曼左拉何塞·可迪诺包蒂斯塔弗朗西斯科·加西亚加西亚
Owner ABENGOA SOLAR NEW TECH SA