Pressure-reducing heating and drying device
A drying device, decompression heating technology, applied in the direction of heating device, heating to dry solid materials, drying solid materials, etc., can solve the problems of difficult decompression drying treatment and heating drying treatment, cumbersome drying treatment process, and long time consumption
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[0020] In the following description, for purposes of illustration rather than limitation, specific details, such as specific system architectures, interfaces, and techniques, are set forth in order to provide a thorough understanding of the present invention.
[0021] The decompression heating and drying device described in the following embodiments of the present invention is used to carry out decompression heating and drying treatment on the coated color filter (Colorfilter, CF) substrate, so that the coated color filter has photoresist The thin film of the agent is fully developed, so that the next step can be processed.
[0022] see figure 1 , figure 1 It is a structural schematic diagram of an embodiment of the vacuum heating drying device of the present invention. The decompression heating and drying device in this embodiment includes a chamber 110 , a carrying mechanism (not shown in the figure), a heating mechanism 120 , a decompression mechanism 130 , and an air pre...
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