Mid-infrared electro-optical modulator based on black phosphorus fluoride waveguide

Abstract

The invention discloses a mid-infrared electro-optical modulator based on a black phosphorus fluoride waveguide, belongs to a mid-infrared electro-optical modulator in the field of optical communication, and aims to provide the mid-infrared electro-optical modulator based on the black phosphorus fluoride waveguide. Fluoride glass is used as a waveguide material, so that a modulation rate of the mid-infrared electro-optical modulator is effectively improved. The invention adopts the technical scheme that the mid-infrared electro-optical modulator comprises a substrate layer; a groove is formed on the upper surface of the substrate layer; a first optical waveguide is arranged in the groove; a first isolation dielectric layer, a first black phosphorus layer, a second isolation dielectric layer, a second black phosphorus layer and a third isolation dielectric layer are sequentially laminated on the upper surface of the first optical waveguide from bottom to top; a second optical waveguide is arranged on the upper surface of the third isolation dielectric layer; the first black phosphorus layer extends out of the left side of the first optical waveguide and is connected with a first electrode; the second black phosphorus layer extends out of the right side of the first optical waveguide and is connected with a second electrode. The invention is applicable to the mid-infrared electro-optical modulator.

Description

technical field [0001] The invention belongs to the field of optical communication and relates to a mid-infrared electro-optic modulator. Background technique [0002] As the basis and key components of optical communication systems, optical modulators have always been a hotspot in the research of integrated optics. Its function is to change the intensity, phase, polarization and other characteristics of the optical carrier passing through the optical modulator, and load the electrical signal on the optical carrier. In recent years, the development of integrated optical devices, especially silicon-based integrated optoelectronic devices, has been very rapid, and various new optical devices have been reported continuously. They have low production costs, high performance reliability, and can be combined with circuit systems to form multifunctional The optoelectronic hybrid module and system will be widely used in communication, sensing, military, biology and many other field...

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Problems solved by technology

However, when the mid-infrared light is modulated by a modulator made of lithium niobate material, the mid-infrared light cannot pass throu

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