Method, device and system for degassing of part of microwave vacuum electronic device

Abstract

The invention relates to a method for degassing of a part of a microwave vacuum electronic device. The method includes the steps of: (1) placing the part in a vacuum chamber containing an electronic gun; (2) fixing the part, and enabling the electronic gun to be aligned with the part; and (3) after the vacuum chamber is vacuumized, opening the electronic gun to bombard the part to performing degassing. The degassing method enables the part, particular gas in a collector to be removed completely, thereby greatly shortening the aging time of the microwave vacuum electronic device, improving the final vacuum in the device at the same time, and thus greatly prolonging the life of the device and generating enormous economic benefits. The method for degassing of the part of the microwave vacuum electronic device is simple and practicable, is low in cost, is high in gas removal efficiency, can greatly reduce the aging time of the microwave vacuum electronic device, and has very high economic value.

Description

technical field [0001] The invention relates to microwave vacuum electronic device technology, in particular to a part degassing method for microwave vacuum electronic devices, a degassing device and a degassing system. Background technique [0002] Microwave vacuum electronic devices are widely used in radar, satellite communications, electron accelerators, global positioning, controllable thermonuclear fusion, and high-power microwave weapons. Their unique functions and superior performance, especially in the case of high power and high frequency It cannot be replaced by other devices. [0003] For microwave vacuum electronic devices, in view of its structure, process characteristics and general working principle, after eliminating early failures, the device performance parameters tend to be stable, and vacuum devices are not sensitive to environmental factors such as temperature and radiation, and the lifespan becomes a characteristic of its An important indicator of rel...

AI Technical Summary

Problems solved by technology

Therefore, it is difficult to remove the dissolved gas and the oxide film on the surface of the metal parts in microwave vacuum electronic devices that are degassed by baking (400-600 ° C).

Under the bombardment of the electron beam, the metal parts in the microwave vacuum electronic device (especially the collector, because it receives more than 90% of the electrons) will release a large amount of gas. Therefore, in order to obtain and maintain the best performance of microwave vacuum electronic devices, long-term The ultra-high vacuum required for life and high reliability must go through a long period of aging (500-1000 hours). Even so, due to the limitation of the volume of titanium pumps used for aging of microwave vacuum electronic devices, their pumping speed is generally small (generally a few liters per second), so the ultimate vacuum of microwave vacuum electronic devices is difficult to reach a very high level

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