Online frequency measurement system for quartz wafer grinding

A quartz wafer and frequency measurement technology, which is applied in the direction of frequency measurement devices, etc., can solve problems such as frequency measurement value jumps, achieve the effects of expanding the scope of application, enhancing anti-interference, and improving grinding quality

Inactive Publication Date: 2016-08-17
RES INST OF ZHEJIANG UNIV TAIZHOU
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Problems solved by technology

[0013] The purpose of the present invention is to solve the technical problem of "jumping frequency measurement va

Method used

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  • Online frequency measurement system for quartz wafer grinding
  • Online frequency measurement system for quartz wafer grinding
  • Online frequency measurement system for quartz wafer grinding

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Embodiment Construction

[0036] The present invention will be further described below in conjunction with the accompanying drawings and specific embodiments.

[0037] Such as figure 1 As shown, the quartz wafer grinding online frequency measurement system of the present invention includes: a power supply module, an MCU control system module, a DDS module, a radio frequency power amplification module, a π network interface module, a signal amplification filtering module, a radio frequency amplitude detection module and a touch screen module;

[0038] The power supply module provides DC power for the MCU control system module, DDS module, radio frequency power amplification module, signal amplification and filtering module, radio frequency amplitude detection module and touch screen module.

[0039] The DDS module generates a sine wave sweep signal of a specified frequency range, sweep rate and radio frequency output amplitude according to the sweep command of the received MCU control system module;

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Abstract

The invention discloses an online frequency measurement system for quartz wafer grinding. The system comprises a power module, an MCU control system module, a DDS module, a radio-frequency power amplifying module, a pi network interface circuit module, a signal amplifying and filtering module, a radio-frequency amplitude detection module and a touch screen module. According to the system, the anti-interference performance of the system is enhanced through the pi network maximum transmission method detection principle based on a DDS technology, and the problem that in an existing ALC system, frequency measurement value jumping change is generated at some frequency bands is solved; all the frequency bands adopt a unified pi network interface circuit, therefore, the defect that a detection head needs to be replaced at the different frequency bands of the existing ALC system is overcome, the electrical failure risk caused by frequent plugging of a radio-frequency connector is reduced, the working stability of the system is enhanced, and the wafer grinding quality and the product quality stability can be significantly improved; through a hardware system scheme, not only can all the frequency bands related to existing wafer grinding production be covered, but also all the cutting types of quartz wafers can be compatible with the system only through modification of algorithm parameters.

Description

technical field [0001] The invention relates to the technical field of test instruments, in particular to an on-line frequency measurement system for quartz wafer grinding. Background technique [0002] Quartz wafer is the core component of crystal oscillator. Quartz crystal oscillator (crystal oscillator) provides time reference for electronic equipment and plays an extremely important role in the electronic information industry. China is a big manufacturer of crystal oscillators, but there is still a big gap between product grades and total output value compared with developed countries. [0003] The manufacturing process of crystal oscillators can be mainly divided into two stages: chip production and chip packaging. The former mainly processes quartz ingots into chips of specific thickness and size through cutting, grinding and corrosion processes; the latter mainly processes them through silver coating, dispensing, Processes such as fine-tuning and sealing package the ...

Claims

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Application Information

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IPC IPC(8): G01R23/02
CPCG01R23/02
Inventor 郭彬潘凌锋陈浙泊陈一信林斌
Owner RES INST OF ZHEJIANG UNIV TAIZHOU
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