Parallel-plate dry-type capacitive pressure sensor

Abstract

By using a parallel-plate dry-type capacitive pressure sensor, problems that an existing sensor making technology requirement is difficult; a precision measurement and control pressure requirement is not easy to satisfy; a yield is low and so on are solved. The sensor comprises a shell, a plane-plate-type fixed electrode in an assembling shell and a moving electrode. The sensor is characterized in that a sapphire insulator of the moving electrode is fixedly connected to a welding block through a silver copper brazing layer, and a bottom surface of the insulator is plated with a plane metal electrode and an insulating layer in a vacuum mode; the moving electrode formed through fixing a membrane and a whole bottom surface of an electrode plate and the fixed electrode are arranged in a parallel mode in a cavity formed through sealing a support sleeve and a connection seat, and the support sleeve and the connection seat are contacted with upper and lower crests of a membrane edge ripple respectively; and components are welded through cutting edges. The structure is designed reasonably, a making technology is simple, material sources are wide, processing quality is good and parallel plate electrode linearity is good. Compared to a same kind of products, the sensor of the invention has high measuring range precision by using the membrane with the same thickness, earthquake-proof performance is stable and corrosion resisting performance is possessed. Production efficiency and a service life are greatly increased and prolonged, and making cost is reduced.

Description

technical field [0001] The invention relates to a dry-type capacitive sensor for measuring medium pressure, in particular to a pure parallel sensor for precise measurement and control of pressure fields that can meet the requirements of certain corrosion resistance, nuclear radiation resistance, high precision, high reliability, etc. Board dry capacitive pressure sensor. It is suitable for measuring micro pressure and absolute micro pressure of gas medium. Background technique [0002] At present, dry capacitive sensors are mostly used for measuring sensitive uranium enrichment and other places that require precise measurement and control of pressure. Although there are hundreds of dry capacitive sensors at home and abroad, the most representative ones used in the industry are the products produced by the American MKS company (structural principles such as Figure 4 , 5 shown), it is a dry capacitive absolute micro pressure sensor. Its structure includes: a casing compose...

AI Technical Summary

Problems solved by technology

[0017] The purpose of the present invention is to provide a parallel plate dry capacitive pressure sensor, which solves the difficult and strict process requirements for the production of the existing dry capacitive sensor, it is not easy to meet the precise pressure measurement and control requirements, the yield rate is low, and the cost is high. Reasonable structural design, simple manufacturing process, wide source of materials, easy processing, good quality, excellent linearity of parallel plate electrodes, compared with similar products, the same thick diaphragm, high range accuracy, stable shock resistance, and corrosion resistance, significantly improving production Efficiency and service life, lower manufacturing costs

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